Vibratory gyroscopic rate sensor

• US 6,848,305 B2
• Filed: 09/06/2002
• Issued: 02/01/2005
• Est. Priority Date: 09/14/2001
• Status: Expired due to Fees

• Current Assignee: Atlantic Inertial Systems Incorporated (Raytheon Technologies Corporation d/b/a RTX)
• Original Assignee: BAE Systems Plc
• Inventors: Eley, Rebecka, Fox, Colin H. J., McWilliam, Stewart, Fell, Christopher P
• Primary Examiner(s): Chapman, John E.
• Application Number:
  US10/475,562
• Publication Number:
  US 20040134279A1
• Time in Patent Office: 879 Days
• Field of Search: 735/041.3, 735/041.2, 735/040.2
• US Class Current: 73/504.13
• CPC Class Codes: G01C 19/5684 the devices involving a micromechanical structure

Abstract

A three axis sensor including a substantially planar vibrator resonator or having a substantially ring or hoop like structure with inner and outer peripheries e tending around a common axis, drive means for causing the resonator to vibrate in an in lane cos 2θ vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to said drive means, pick-off means for sensing in plane sin 2θ resonator motion induced by rotation about the z-axis, drive means for nulling said motion, pick-off means for sensing out of plane sin 3θ resonator motion induced by rotation about the x-axis, drive means for nulling said motion, pick-off means for sensing out of plane cos 3θ resonator motion induced by rotation about the y-axis, drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and to applied rotations, wherein the support means comprises only L support beams, where L≠2^J×3^K and J=0, 1 or 2 and K=0 or 1 with L<24.

Claims

1. A three axis sensor including a substantially planar vibratory resonator (2) having a substantially ring or hoop like structure with inner and outer peripheries extending around a common axis (R), drive means (4) for causing the resonator (2) to vibrate in an in plane cos 2θ

vibration mode, carrier mode pick-off means (5) for sensing movement of the resonator (2) in response to said drive means (4), pick-off means (6) for sensing in plane sin 2θ

resonator motion induced by rotation about the z-axis, drive means (7) for nulling said motion, pick-off means (8) for sensing out of plane sin 3θ

resonator motion induced by rotation about the x-axis, drive means (9) for nulling said motion, pick-off means (10) for sensing out of plane cos 3θ

resonator motion induced by rotation about the y-axis, drive means (11) for nulling said motion, and support means (3) for flexibly supporting the resonator (2) and for allowing the resonator to vibrate relative to the support means (3) in response to the drive means and to applied rotation, characterised in that the support means (3) comprises only L support beams, where L≠

2^J×

3^K and J=0, 1 or 2 and K=0 or 1 with L<

24.

2. A rate sensor according to claim 1, wherein each support means (3) is a beam comprising first and second linear portions (9¹, 9¹¹¹) extending from opposite ends of an arcuate portion (9¹¹).

3. A rate sensor according to claim 2, wherein the support beams are substantially equi-angularly spaced.

4. A rate sensor according to claims 3, wherein the support means (3) includes a base having a projecting boss (13), with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss (13) by the support beams which extend from said inner periphery of the ring or hoop like structure to the projecting boss (13) so that the ring or hoop-like structure of the resonator (2) is spaced from a base (12).

5. A rate sensor according to claim 3 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

6. A rate sensor according to claim 2, wherein the support means (3) includes a base having a projecting boss (13), with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss (13) by the support beams which extend from said inner periphery of the ring or hoop like structure to the projecting boss (13) so that the ring or hoop-like structure of the resonator (2) is spaced from a base (12).

7. A rate sensor according to claim 2 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

8. A rate sensor according to claim 1 wherein the support means (3) includes a base having a projecting boss (13), with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss (13) by the support beams which extend from said inner periphery of the ring or hoop like structure to the projecting boss (13) so that the ring or hoop-like structure of the resonator (2) is spaced from a base (12).

9. A rate sensor according to claim 8 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

10. A rate sensor according to claim 1 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

11. A three axis sensor including a substantially planar vibratory resonator (2) having a substantially ring or hoop like structure with inner and outer peripheries extending around a common axis (R), drive means (14) for causing the resonator (2) to vibrate in an in plane cos 3θ

vibration mode, carrier mode pick-off means (15) for sensing movement of the resonator (2) in response to said drive means (14), pick-off means (17) for sensing in plane sin 3θ

resonator motion induced by rotation about the z-axis, drive means (16) for nulling said motion, pick-off means (18) for sensing out of plane cos 2θ

resonator motion induced by rotation about the y-axis, drive means (19) for nulling said motion, pick off means (20) for sensing out of plane Sin 2θ

resonator motion induced by rotation around the x-axis, drive means (21) for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and to applied rotations, characterised in that the support means (3) comprises only L support beams, where L≠

2^J ×

3^K and J=0, 1 or 2 and K=0 or 1 with L<

24.

12. A rate sensor according to claim 11, wherein each support means (3) is a beam comprising first and second linear portions (9¹, 9¹¹¹) extending from opposite ends of an arcuate portion (9¹¹).

13. A rate sensor according to claim 12, wherein the support beams are substantially equi-angularly spaced.

14. A rate sensor according to claim 13, wherein the support means (3) includes a base having a projecting boss (13), with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss (13) by the support beams which extend from said inner periphery of the ring or hoop like structure to the projecting boss (13) so that the ring or hoop-like structure of the resonator (2) is spaced from a base (12).

15. A rate sensor according to claim 13 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

16. A rate sensor according to claim 12, wherein the support means (3) includes a base having a projecting boss (13), with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss (13) by the support beams which extend from said inner periphery of the ring or hoop like structure to the projecting boss (13) so that the ring or hoop-like structure of the resonator (2) is spaced from a base (12).

17. A rate sensor according to claim 12 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

18. A rate sensor according to claim 11, wherein the support means (3) includes a base having a projecting boss (13), with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss (13) by the support beams which extend from said inner periphery of the ring or hoop like structure to the projecting boss (13) so that the ring or hoop-like structure of the resonator (2) is spaced from a base (12).

19. A rate sensor according to claim 18 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).

20. A rate sensor according to claim 11 wherein the total stiffness of the support means is less than that of the ring or hoop-like structure of the resonator (2).