Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers

• US 6,848,876 B2
• Filed: 01/12/2001
• Issued: 02/01/2005
• Est. Priority Date: 01/12/2001
• Status: Expired due to Term

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Inventors: Fosnight, William J., Sammut, Mark, Babbs, Daniel J., Cosentino, Tim, Zemen, Russell, Pinna, Pascal
• Primary Examiner(s): Keenan, James W.
• Application Number:
  US09/760,147
• Publication Number:
  US 20020094257A1
• Time in Patent Office: 1,481 Days
• Field of Search: 414/223.01, 414/277, 414/331.05, 414/331.06, 414/331.1, 414/331.11, 414/217.1, 414/937, 414/938, 414/940, 198/347.2, 198/347.3
• US Class Current: 414/217.1
• CPC Class Codes: B65G 1/045 in a circular arrangement, e.g. towers
• CPC Class Codes: B65G 1/16 Special arrangements of articles in storage spaces
• CPC Class Codes: G03F 7/70741 Handling masks outside exposure position, e.g. reticle libraries
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: Y10S 414/138 Wafers positioned vertically within cassette

Abstract

A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embodiments of the present invention, the reticle management system includes between one and six individual bare reticle stockers and/or closed container stockers for storing reticles affixed to a reticle sorter. The sorter includes a reticle inspection station for inspecting the reticles, a plurality of input/output (I/O) load ports and a reticle handling robot for transferring the reticles between the stockers, the inspection station and the I/O load ports. The management system further includes a control unit for housing control electronics for the system.

Claims

1. A reticle management system for storing individual reticles after the reticles have been removed from a SMIF pod, the SMIF pod having a pod door that is removably coupled to a pod shell, the system comprising:

a load port assembly, said load port assembly being capable of supporting the SMIF pod and separating the pod door from the pod shell to provide access to the reticles stored within the SMIF pod;

a reticle stocker adapted to store each of the reticles once the reticle has been removed from the SMIF pod, said reticle stocker including;

a rotatable central shaft;

a plurality of annular carousels coaxially aligned with and secured to said rotatable central shaft, each one of said plurality of annular carousels having multiple substantially radially oriented slots extending outward from said rotatable central shaft such that each said slot stores an individual reticle in a substantially vertical orientation;

a fan filter unit adapted to circulate clean air by the reticles seated in each said slot; and

a reticle transfer mechanism for transferring reticles between said slots and the SMIF pod.