Flip chip on glass sensor package

• US 6,849,916 B1
• Filed: 11/15/2000
• Issued: 02/01/2005
• Est. Priority Date: 11/15/2000
• Status: Expired due to Term

• Current Assignee: Amkor Technology Singapore Holding Pte., Ltd. (Amkor Technology Incorporated)
• Original Assignee: Amkor Technology Incorporated
• Inventors: Glenn, Thomas P., Webster, Steven, Hollaway, Roy Dale
• Primary Examiner(s): Graybill, David E.
• Application Number:
  US09/713,848
• Time in Patent Office: 1,539 Days
• Field of Search: 438/64, 438/116, 257/434, 257/459, 257/680
• US Class Current: 257/434
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 31/0203 Containers; Encapsulations , e.g. encapsulation of photodiodesfor photovoltaic devices H01L31/048; for organic photosensitive devices H10K30/80
• CPC Class Codes: H04N 23/54 Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils

Abstract

An image sensor package includes an image sensor having an active area and bond pads on a front surface of the image sensor. A window is mounted to the image sensor by flip chip bumps formed between the bond pads of the image sensor and interior traces on an interior surface of the window. The window has an area less than an area of the front surface of the image sensor. A bead is formed between the window and the front surface of the image sensor thus forming a sealed cavity in which the active area is located. The bead has sides coplanar with sides of the image sensor such that the image sensor package is chip size.

Claims

1. A structure comprising:

an image sensor having an active area and a bond pad on a first surface of said image sensor;

a window having an interior surface and an exterior surface opposite said interior surface, said interior surface of said window facing said first surface of said image sensor, the area of said interior surface of said window being less than the area of said first surface of said image sensor; and

an electrically conductive via extending through said window from said interior surface to said exterior surface of said window, said via being electrically connected to said bond pad.

2. The structure of claim 1 wherein said structure is a chip size image sensor package.

3. The structure of claim 1 wherein said active area is responsive to radiation, said window being transparent to said radiation.

4. The structure of claim 1 further comprising:

an electrically conductive interior trace on said interior surface of said window; and

an electrically conductive bump electrically connecting said bond pad to said interior trace.

5. The structure of claim 4 wherein said interior trace is a land aligned with said via, said bump and said bond pad.

6. The structure of claim 4 wherein said interior trace is a metallization extending along said interior surface of said window.

7. The structure of claim 4 wherein said via is offset from said bump, said interior trace extending along said interior surface of said window to electrically connect said via to said bump.

8. The structure of claim 1 further comprising an electrically conductive exterior trace on said exterior surface of said window, said exterior trace being electrically connected to said via.

9. The structure of claim 8 further comprising an electrically conductive pad on said exterior trace.

10. The structure of claim 9 wherein said exterior trace is a land aligned with said via and said electrically conductive pad.

11. The structure of claim 9 wherein said exterior trace is a metallization extending along said exterior surface of said window.

12. The structure of claim 9 wherein said via is offset from said electrically conductive pad, said exterior trace extending along said exterior surface of said window to electrically connect said via to said electrically conductive pad.

13. The structure of claim 1 wherein said window includes a central region and a peripheral region, said central region being aligned with said active area, said via being formed within said peripheral region.

14. The structure of claim 13 further comprising a bead contacting said first surface of said image sensor and further contacting said peripheral region of said window, said bead forming a seal between said peripheral region of said window and said image sensor.

15. The structure of claim 14 wherein said window, said bead, and said image sensor define a sealed cavity.

16. The structure of claim 15 wherein said active area is responsive to radiation, said cavity containing a medium transparent to said radiation.

17. The structure of claim 16 wherein said medium is air.

18. The structure of claim 16 wherein said medium is an encapsulant.

19. The structure of claim 1 further comprising an image sensor substrate comprising said image sensor.

27. The structure of claim 9 further comprising an electrically conductive interconnection ball on said electrically conductive pad.

20. An image sensor package comprising:

an image sensor having an active area and bond pads on a first surface of said image sensor;

a window having an interior surface and mounted to said image sensor, the area of said interior surface of said window being less than the area of said first surface of said image sensor;

a plurality of electrically conductive interior traces on an interior surface of said window;

a plurality of electrically conductive bumps electrically and physically connecting said bond pads to said interior traces;

a plurality of electrically conductive vias extending from said interior surface of said window to an exterior surface of said window, said vias being electrically connected to said interior traces;

a plurality of electrically conductive exterior traces on said exterior surface of said window, said exterior traces being electrically connected to said vias;

a plurality of electrically conductive pads on said exterior traces; and

a plurality of electrically conductive interconnection balls on said electrically conductive pads.

21. The image sensor package of claim 20, wherein said window comprises a central region aligned with said active area and a peripheral region, said interior traces, said vias and said exterior traces being formed within said peripheral region.

22. The image sensor package of claim 21 further comprising a bead forming a seal between said peripheral region and said image sensor.

23. The image sensor package of claim 22 wherein said bead has sides coplanar with sides of said image sensor.

24. The image sensor package of claim 23 wherein said image sensor package is chip size.

25. The image sensor package of claim 20 further comprising an image sensor substrate comprising said image sensor.

26. An image sensor package comprising:

an image sensor having a bond pad on a first surface of said image sensor;

a window having an interior surface, the area of said interior surface of said window being less than the area of said first surface of said image sensor;

an electrically conductive interior trace on said interior surface of said window; and

an electrically conductive bump electrically connecting said bond pad to said interior trace.

28. An image sensor package comprising:

an image sensor having an active area and bond pads on a first surface of said image sensor;

a window mounted to said image sensor, the area of said window in a plane parallel to said first surface of said image sensor being less than the area of said first surface of said image sensor;

a plurality of electrically conductive interior traces on an interior surface of said window;

a plurality of electrically conductive bumps electrically and physically connecting said bond pads to said interior traces;

a plurality of electrically conductive vias extending from said interior surface of said window to an exterior surface of said window, said vias being electrically connected to said interior traces;

a plurality of electrically conductive exterior traces on said exterior surface of said window, said exterior traces being electrically connected to said vias;

a plurality of electrically conductive pads on said exterior traces; and

a plurality of electrically conductive interconnection balls on said electrically conductive pads.