Fast high-accuracy multi-dimensional pattern inspection
DCFirst Claim
1. A method for mapping a current pose P of an image boundary in a digital image into a more accurate pose P′
- of the image boundary, the image boundary having N image boundary points, the method comprising;
solving a plurality of simultaneous equations, the plurality including an equation for each of a respective plurality of image boundary points of the image boundary, so as to provide a coordinate transform; and
applying the coordinate transform to each of the image boundary points that maps the current pose P of the image boundary into a more accurate pose P′
of the image boundary, the coordinate transform being of the form P′
=CP+t, where C is a matrix, and t is a translation vector.
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Abstract
A method and apparatus are provided for identifying diffe rences between a stored pattern and a matching image subset, where variations in pattern position, orientation, and size do not give rise to false differences. The invention is also a system for analyzing an object image with respect to a model pattern so as to detect flaws in the object image. The system includes extracting pattern features from the model pattern; generating a vector-valued function using the pattern features to provide a pattern field; extracting image features from the object image; evaluating each image feature, using the pattern field and an n-dimensional transformation that associates image features with pattern features, so as to determine at least one associated feature characteristic; and using at least one feature characteristic to identify at least one flaw in the object image. The invention can find at least two distinct kinds of flaws: missing features, and extra features. The invention provides pattern inspection that is faster and more accurate than any known prior art method by using a stored pattern that represents an ideal example of the object to be found and inspected, and that can be translated, rotated, and scaled to arbitrary precision much faster than digital image re-sampling, and without pixel grid quantization errors. Furthermore, since the invention does not use digital image re-sampling, there are no pixel quantization errors to cause false differences between the pattern and image that can limit inspection performance.
82 Citations
60 Claims
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1. A method for mapping a current pose P of an image boundary in a digital image into a more accurate pose P′
- of the image boundary, the image boundary having N image boundary points, the method comprising;
solving a plurality of simultaneous equations, the plurality including an equation for each of a respective plurality of image boundary points of the image boundary, so as to provide a coordinate transform; and
applying the coordinate transform to each of the image boundary points that maps the current pose P of the image boundary into a more accurate pose P′
of the image boundary, the coordinate transform being of the form P′
=CP+t, where C is a matrix, and t is a translation vector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
- of the image boundary, the image boundary having N image boundary points, the method comprising;
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17. A method for mapping a current pose P of an image boundary in a digital image into a more accurate pose P′
- of the image boundary, the image boundary having N image boundary points, the method comprising;
solving a plurality of simultaneous equations so as to provide a coordinate transform, the plurality including an equation for each of a respective plurality of image boundary points of the image boundary, the plurality being simultaneously solved using a least-squares method to minimize a linear sum of a plurality of squared error terms, each error term corresponding to an image boundary point; and
applying the coordinate transform to each of the image boundary points that maps the current pose P of the image boundary into a more accurate pose P′
of the image boundary, the coordinate transform being of the form P′
=CP+t, where C is a matrix, and t is a translation vector. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
- of the image boundary, the image boundary having N image boundary points, the method comprising;
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31. In a geometric pattern matching apparatus for refining a starting pose of an object in a run-time image, the object having an expected shape and a true pose in the run-time image, the starting pose representing an initial estimate of the true pose of the object in the run-time image, the geometric pattern matching apparatus having (1) a stored model pattern, the stored model pattern including a geometric description of the expected shape of the object, the geometric description including a plurality of pattern boundary points of a pattern boundary, and a vector-valued function of position within a region that includes the pattern boundary points, and (2) a feature detector configured to detect in the run-time image a plurality of image boundary points, a method for mapping a current pose P of an image boundary in the run-time image into a more accurate pose P′
- of the image boundary, the image boundary having a plurality of image boundary points, the method comprising;
solving a plurality of simultaneous equations, the plurality including an equation for each of a respective plurality of image boundary points of the image boundary, so as to provide a coordinate transform; and
applying the coordinate transform to each of the image boundary points that maps the current pose P of the image boundary into a more accurate pose P′
of the image boundary. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
- of the image boundary, the image boundary having a plurality of image boundary points, the method comprising;
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47. A method for mapping a current pose P of an image boundary in a digital image into a more accurate pose P′
- of the image boundary, the image boundary having N image boundary points, the method comprising;
solving a plurality of simultaneous equations so as to provide a coordinate transform, the plurality including an equation for each of a respective plurality of image boundary points of the image boundary, the plurality being solved by using an error minimization method to minimize a sum of a plurality of error terms, each error term corresponding to an image boundary point;
each error term including a magnitude of a component of a vector in the direction of a displacement vector representing a minimum distance between an image boundary point and a pattern boundary, minus a magnitude of the displacement vector; and
applying the coordinate transform to each of the image boundary points that maps the current pose P of the image boundary into a more accurate pose P′
of the image boundary. - View Dependent Claims (48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60)
- of the image boundary, the image boundary having N image boundary points, the method comprising;
Specification