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Low-loss waveguide and method of making same

  • US 6,850,683 B2
  • Filed: 06/07/2001
  • Issued: 02/01/2005
  • Est. Priority Date: 07/10/2000
  • Status: Expired due to Term
First Claim
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1. A method of making a low-loss high index difference waveguide having silicon as its core, comprising:

  • providing a planar strip waveguide having core/cladding interface roughness; and

    subjecting said waveguide to one or more reactions so that one of said reactions produces reaction products with different chemical compositions from that of said core and reduce the core/cladding interface root-mean-square (RMS) roughness in order to in turn reduce scattering losses in said waveguide, wherein the effective index difference between said core and cladding is above 0.1, said reaction products having graded refractive index profiles from that of the core to that of the cladding.

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