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Brush drive assembly in a substrate processing brush box

  • US 6,851,151 B1
  • Filed: 06/27/2002
  • Issued: 02/08/2005
  • Est. Priority Date: 06/29/2001
  • Status: Expired due to Fees
First Claim
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1. A pair of brush cores, each of the brush cores being adapted to receive a brush, the pair of brush cores configured to reside within a brush box, the pair of brush cores being controlled by a position control assembly, the position control assembly comprising:

  • a first brush drive shaft and a second brush drive shaft, each of the first and second brush drive shafts being respectively configured to receive one of the pair of brush cores;

    a first angle gear and a second angle gear, the first angle gear being coupled to the first brush drive shaft and the second angle gear being coupled to the second brush drive shaft, the first angle gear having a first set of teeth and the second angle gear having a second set of teeth, the first set of teeth and the second set of teeth being aligned and interlocked; and

    a gear coupled to the first brush drive shaft, the gear capable of positive control so as to cause the first angle gear to pivot, the pivoting of the first angle gear being transferred to the second angle gear by being aligned and interlocked, the transferred pivoting causing an equal and opposite pivoting of the second angle gear, the pivoting of the first and second angle gear causing an associated pivoting of the pair of brush cores within the brush box.

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