Method and apparatus for removing organic films

• US 6,851,873 B2
• Filed: 10/14/2003
• Issued: 02/08/2005
• Est. Priority Date: 10/23/2001
• Status: Expired due to Term

• Current Assignee: Nomura Micro Science Co.,Ltd., Ums Co., Ltd.
• Original Assignee: Nomura Micro Science Co.,Ltd., Ums Co., Ltd.
• Inventors: Endo, Mitsuru, Muraoka, Hisashi, Sato, Asuka, Muraoka, Rieko
• Primary Examiner(s): Rutledge, D.
• Application Number:
  US10/683,288
• Publication Number:
  US 20040076912A1
• Time in Patent Office: 483 Days
• Field of Search: 396/604, 396/611, 396/627, 134/1, 134/10, 134/11, 134/38, 134/109, 134/122, 430/329, 438/723, 156/651
• US Class Current: 396/611
• CPC Class Codes: B08B 2203/005 the liquid being ozonated
• CPC Class Codes: B08B 3/02 Cleaning by the force of jets or sprays
• CPC Class Codes: B08B 3/04 Cleaning involving contact with liquid
• CPC Class Codes: C09D 9/005 containing organic solvents
• CPC Class Codes: C11D 2111/22 Electronic devices, e.g. PCBs or semiconductors
• CPC Class Codes: C11D 7/266 Esters or carbonates
• CPC Class Codes: G03F 7/422 using liquids only G03F7/421 takes precedence
• CPC Class Codes: G03F 7/423 containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds

Abstract

A method and an apparatus for removing an organic film, such as a resist film, from a substrate surface are provided wherein a treatment liquid containing dissolved ozone, and preferably formed from liquid ethylene or propylene carbonate, or both, is contacted with the substrate having the organic film, and the organic film removed, wherein the apparatus contains (A) a treatment liquid delivery device, (B) a film contact device, (C) a liquid circulation device and (D) an ozone dissolution device.

Claims

1. An apparatus for removing an organic film from a surface of a substrate comprising:

(A) a treatment liquid delivery means for transporting a treatment liquid comprising liquid ethylene carbonate, propylene carbonate, or both thereof to a treatment area,

(B) a film contact means for bringing said treatment liquid into contact with the surface of said organic film of said substrate within said treatment area,

(C) a treatment liquid circulation means for recycling the treatment liquid used and discharged from said treatment area back to said treatment area via one or more temporary storage means, and

(D) an ozone-containing gas contact means for bringing an ozone-containing gas into contact with said treatment liquid discharged from said treatment area within at least one of said temporary storage means.

2. The apparatus according to claim 1, wherein at least one means of the means (A) to (D) is provided with a heating means.

3. The apparatus according to claim 1, wherein said treatment area comprises a means for immersing a substrate in a treatment liquid.

4. The apparatus according to claim 1, wherein said treatment area comprises a means for applying a treatment liquid to a substrate through a nozzle.

5. The apparatus according to claim 1, wherein said treatment area comprises a means for rotating a substrate about an axis perpendicular to a surface of said substrate.

6. The apparatus according to claim 5, further comprising a nozzle for supplying liquid ethylene carbonate onto a surface of a substrate rotating about said axis to form an ethylene carbonate film on said surface, and a nozzle for projecting cold air onto said surface of said substrate for solidifying said ethylene carbonate liquid film.

7. The apparatus according to claim 5, further comprising a nozzle for supplying a treatment liquid onto a surface of a substrate rotating about said axis, and a nozzle for projecting a high concentration ozone gas onto said surface of said substrate.

8. The apparatus according to claim 1, comprising a means for irradiating high frequency ultrasound through a treatment liquid.

9. The apparatus according to claim 1, wherein said organic film is a resist film.

10. The apparatus according to claim 1, wherein said treatment liquid further comprises an aliphatic carboxylic acid-based complexing agent.

11. The apparatus according to claim 10, wherein said aliphatic carboxylic acid-based complexing agent is tartaric acid, citric acid or oxalic acid.

12. The apparatus according to claim 10, wherein said aliphatic carboxylic acid-based complexing agent is present in a quantity of from 0.03 to 1.5% by weight in said treatment liquid.