Methods, systems, and apparatus for uniform chemical-vapor depositions

• US 6,852,167 B2
• Filed: 03/01/2001
• Issued: 02/08/2005
• Est. Priority Date: 03/01/2001
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Ahn, Kie Y.
• Primary Examiner(s): Lund, Jeffrie R.
• Application Number:
  US09/797,324
• Publication Number:
  US 20020122885A1
• Time in Patent Office: 1,440 Days
• Field of Search: 118/715
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles

Abstract

Integrated circuits, the key components in thousands of electronic and computer products, are generally built layer by layer on a silicon substrate. One common technique for forming layers is called chemical-vapor deposition (CVD.) Conventional CVD systems not only form layers that have non-uniform thickness, but also have large chambers that make the CVD process wasteful and slow. Accordingly, the inventor devised new CVD systems, methods, and apparatuses. One exemplary CVD system includes an outer chamber, a substrate holder, and a unique gas-distribution fixture. The fixture includes a gas-distribution surface having holes for dispensing a gas and a gas-confinement member that engages or cooperates with the substrate holder to form an inner chamber within the outer chamber. The inner chamber has a smaller volume than the outer chamber, which not only facilitates depositions of more uniform thickness, but also saves gas and speeds up the deposition process.

Claims

1. A chemical-vapor-deposition system comprising:

a first chamber;

a gas-distribution fixture in the first chamber, the fixture including a gas-distribution surface having a plurality of holes and a gas-confinement member extending from the gas-distribution surface around the plurality of holes, and the fixture being movable from at least a first operating position to a second operating position; and

a wafer holder having a wafer-support surface confronting the gas-distribution surface.

2. The system of claim 1, wherein the gas-confinement member comprises extends perpendicularly from the gas-distribution surface.

3. The system of claim 1, wherein the wafer-support surface is substantially parallel to the gas-distribution surface.

4. The system of claim 1, wherein the gas-confinement member surrounds all the holes.

5. The system of claim 1, wherein the gas-confinement member consists essentially of a material different from that of the gas-distribution surface.

6. The system of claim 1, wherein the gas-distribution surface is substantially planar and comprises silicon and silicon oxide.

7. The system of claim 1, wherein at the second operating position the fixture defines a second chamber within the first chamber, with the second chamber sized to contain a wafer having a 300-millimeter width or diameter.

8. The system of claim 1, wherein at the second operating position the gas-confinement member contacts the wafer support surface and the fixture defines a second chamber within the first chamber, with the second chamber sized to contain a wafer having a 300-millimeter width or diameter and to define a volume in the range of 70-350 cubic centimeters.

9. The system of claim 1, wherein the second operating position is for placing the gas-distribution surface in the range of 1-5 millimeters from an uppermost surface of a wafer on the wafer-support surface.

10. The system of claim 1, wherein each of the holes has a nominal width or diameter in the range of 15-20 microns.

11. The system of claim 1, wherein the gas-confinement member extends from the gas-distribution surface to define an acute or obtuse angle.

12. A chemical-vapor-deposition system comprising:

a first chamber;

a gas-distribution fixture in the first chamber, the fixture movable from at least a first operating position to a second operating position and including;

a gas-distribution member comprising;

a first plate having one or more gas-distribution channels; and

a second plate adjacent the first plate and having a plurality of holes that define a gas-distribution surface; and

a gas-confinement member extending from the gas-distribution surface around the plurality of holes; and

a wafer holder having a wafer-support surface confronting the gas-distribution surface.

13. The system of claim 12, wherein the first and second plates each consist essentially of silicon and silicon oxide.

14. The system of claim 12, wherein the first and second plates are bonded to each other.

15. The system of claim 14:

wherein at the second operating position, the gas-confinement member contacts the wafer support surface and the fixture defines a second chamber within the first chamber, with the second chamber sized to contain a wafer having a 300-millimeter width or diameter and to define a volume in the range of 70-350 cubic centimeters; and

wherein the system further comprises a first pump coupled to evacuate the first chamber and a second pump coupled to evacuate the second chamber through the gas-distribution fixture.

16. The system of claim 12, wherein the gas-confinement member extends perpendicularly from the gas-distribution surface.

17. The system of claim 12, wherein the wafer support surface is substantially parallel to the second plate.

18. The system of claim 12, wherein the gas-confinement member surrounds all the holes.

19. The system of claim 12, wherein the gas-confinement member consists essentially of a material different from that of the gas-distribution surface.

20. The system of claim 12, wherein the gas-distribution surface is substantially planar and comprises silicon.

21. The system of claim 12, wherein the first and second plates including respective first and second major surfaces that are in contact with each other.

22. The system of claim 12, further comprising a bond between the first and second plates.

23. A chemical-vapor-deposition system comprising:

a first chamber having an interior sidewall; and

a second chamber within the first chamber, the second chamber including;

a gas-distribution member having a plurality of holes that define a gas-distribution surface; and

a gas-confinement surface partly enclosing the plurality of holes, the gas-confinement surface spaced from the interior sidewall of the first chamber, nonparallel to the gas-distribution surface, and movable in unison with the gas-distribution member from a first to a second operating position; and

a wafer-support surface confronting the gas-distribution surface.

24. The system of claim 23, wherein the gas-distribution member comprises first and second non-metal plates, with the first plate including the plurality of holes and the second plate including one or more channels for providing fluid communication with one or more of the holes.

25. The system of claim 24, wherein the wafer support surface is substantially parallel to the second plate.

26. The system of claim 23, wherein the gas-confinement surface is substantially perpendicular to the gas-distribution surface.

27. The system of claim 23, wherein the gas-confinement surface consists essentially of a material different from that of the gas-distribution surface.

28. The system of claim 23, wherein the gas-distribution surface is substantially planar and comprises silicon.

29. The system of claim 23, wherein the first and second plates consist essentially of silicon and a silicon oxide.

30. The system of claim 23, wherein two or more of the gas-distribution channels are perpendicular to each other.

31. The system of claim 23, further comprising:

a first pump coupled to evacuate the first chamber; and

a second pump coupled to evacuate the second chamber through the gas-distribution fixture.

32. A chemical-vapor deposition system comprising:

first means for confining one or more gases;

second means for confining one or more gases, the first means at least partly contained within the first means and movable from a first operating position to a second operating position.

33. The system of claim 32, further comprising:

a first pump for evacuating the first means; and

a second pump coupled to evacuate the second means.

34. A gas-distribution fixture for a chemical-vapor-deposition system, the fixture comprising:

a first non-metallic plate including one or more gas-distribution channels for coupling to a gas source;

a second non-metallic plate including one or more gas-distribution holes in fluid communication with the gas-distribution channels of the first plate; and

a gas-confinement wall extending outward relative the gas-distribution surface and surrounding the one or more gas-distribution holes.

35. The fixture of claim 34, wherein the gas-confinement wall is perpendicular to the gas-distribution surface.

36. The fixture of claim 34, wherein the gas-confinement wall consists essentially of a material that is different from that of the second non-metallic plate.

37. The fixture of claim 34, wherein the gas-confinement wall consists essentially of a stainless steel and the first and second non-metallic plates each consist essentially of silicon.

38. The fixture of claim 34, wherein each of the holes has a nominal width or diameter in the range of 15-20 microns.

39. The fixture of claim 38, wherein each of the channels has a nominal width in the range of 20-45 microns.

40. A gas-distribution fixture for use in a chemical-vapor-deposition chamber having a first volume, the fixture comprising:

means for distributing gas in at least a first dimension across a surface within the chamber, with the means for distributing gas movable from a first operating position to a second operating position; and

means for at least partly confining the distributed gas to a second volume which is less than the first volume.

41. The gas-distribution fixture of claim 40, wherein the means for distributing gas consists essentially of a non-reactive material.

42. The gas-distribution fixture of claim 40, wherein the means for distributing gas includes a plurality of holes and the means for at least partly confining the distributed gas encompasses the plurality of holes.

43. A chemical-vapor-deposition system comprising:

a first chamber;

a gas-distribution fixture in the first chamber, the fixture including a gas-distribution surface having a plurality of holes and a gas-confinement member extending from the gas-distribution surface around the plurality of holes, and the fixture being movable from at least a first operating position to a second operating position;

a wafer holder having a wafer-support surface confronting the gas-distribution surface, wherein at the second operating position, the gas-distribution surface, the gas-confinement member, and the wafer-support surface defines a second chamber within the first chamber;

a first pump coupled to evacuate the first chamber; and

a second pump coupled to evacuate the second chamber through the gas-distribution fixture.

44. The system of claim 43, wherein the second chamber is sized to contain a wafer having a 300-millimeter width or diameter and to define a volume in the range of 70-350 cubic centimeters.

45. The system of claim 43, wherein the second operating position is for placing the gas-distribution surface in the range of 1-5 millimeters from an uppermost surface of a wafer on the wafer-support surface.

46. The system of claim 43, wherein each of the holes has a nominal width or diameter in the range of 15-20 microns.

47. The system of claim 43, wherein the first pump has a greater capacity than the second pump.