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Method of fabricating long-wavelength VCSEL and apparatus

  • US 6,852,557 B1
  • Filed: 07/29/2003
  • Issued: 02/08/2005
  • Est. Priority Date: 08/21/2000
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a long-wavelength vertical cavity surface emitting laser comprising the steps of:

  • depositing a long wave-length active region on a compatible substrate, the long wave-length active region having a first major surface;

    depositing a first mirror stack on the first major surface of the long wave-length active region so as to define a major surface of the first mirror stack;

    affixing a supporting substrate to the major surface of the first mirror stack;

    removing the compatible substrate to expose an opposed second major surface of the long wave-length active region; and

    depositing a second mirror stack on the second major surface of the long wave-length active region;

    wherein the step of depositing the long wave-length active region on the compatible substrate includes epitaxially growing an indium phosphide based active region on an indium phosphide based substrate.

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