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Gap adjustment apparatus and gap adjustment method for adjusting gap between two objects

  • US 6,852,988 B2
  • Filed: 11/27/2001
  • Issued: 02/08/2005
  • Est. Priority Date: 11/28/2000
  • Status: Expired due to Fees
First Claim
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1. A gap adjustment apparatus comprising:

  • a first holder for holding a first object having a first measurement surface;

    a second holder for holding a second object having a second measurement surface, in a manner such that the second measurement surface faces the first measurement surface;

    a first displacement gauge for measuring a distance extending from the first displacement gauge to the first measurement surface;

    a target whose relative position with respect to the first displacement gauge is fixed, the target having a target measurement surface orientated in the same direction as the second measurement surface;

    a second displacement gauge for measuring distances extending from the second displacement gauge to the second measurement surface and to the target measurement surface; and

    a moving mechanism for moving the first holder and the second holder to alter a gap between the first measurement surface and the second measurement surface, wherein when the gap between the first measurement surface and the second measurement surface is altered, a gap between the second displacement gauge and the target measurement surface is not altered.

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