Self-assembled nanobump array stuctures and a method to fabricate such structures
First Claim
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1. A self-assembled nanobump array structure comprising:
- at least one nanobump-forming substrate layer; and
a semi-absorbing outer layer provided on the at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer;
wherein the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer.
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Abstract
A self-assembled nanobump array structure including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer.
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Citations
34 Claims
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1. A self-assembled nanobump array structure comprising:
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at least one nanobump-forming substrate layer; and
a semi-absorbing outer layer provided on the at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer;
wherein the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for fabricating a nanobump array structure, the method comprising:
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depositing a wide bandgap semiconductor material upon a substrate to form a composite layered structure; and
irradiating the composite layered structure with laser energy;
wherein the wide bandgap semiconductor material slowly ablates allowing most of the laser energy to be transmitted to the substrate, and an energy and a pressure buildup occurs in the composite layered structure to form the nanobump array structure. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification