Integrated circuit inductor with a magnetic core
First Claim
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1. A method of fabricating an inductor comprising:
- forming a plurality of vias in a substrate;
forming a magnetic core within the substrate;
depositing a first metallic material into the vias to form a plurality of metallic posts; and
fabricating a plurality of conductive segments that interconnect the plurality of metallic posts to form a conductive coil surrounding the magnetic core.
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Abstract
An inductor is fabricated on a substrate having a top surface and a bottom surface. The inductor includes a plurality of holes extending through the substrate, wherein the plurality of holes interconnect the top surface and the bottom surface of the substrate. The inductor also includes a plurality of conductive posts formed in the plurality of holes and a plurality of conductive segments formed on the top surface and on the bottom surface that interconnect the conductive posts such that a continuous conductive coil is formed. The inductor also includes a magnetic core that occupies substantially the entire volume enclosed by the conductive coil.
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Citations
31 Claims
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1. A method of fabricating an inductor comprising:
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forming a plurality of vias in a substrate;
forming a magnetic core within the substrate;
depositing a first metallic material into the vias to form a plurality of metallic posts; and
fabricating a plurality of conductive segments that interconnect the plurality of metallic posts to form a conductive coil surrounding the magnetic core. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. An inductor comprising:
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a substrate;
a magnetic core formed within the substrate;
a plurality of vias filled with a metallic material providing a plurality of metallic posts through the substrate; and
a plurality of conductive segments interconnecting the plurality of conductive posts to form a conductive coil surrounding the magnetic core. - View Dependent Claims (28, 29, 30, 31)
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Specification