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Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry

  • US 6,853,517 B2
  • Filed: 02/13/2003
  • Issued: 02/08/2005
  • Est. Priority Date: 02/13/2003
  • Status: Expired due to Term
First Claim
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1. A disk drive comprising:

  • a magnetic recording disk having a plurality of data tracks;

    a read/write head for reading data from and writing data to the disk;

    a primary actuator for coarse positioning the head over a selected track; and

    an electrostatic secondary actuator connected to the head and the primary actuator for fine positioning the head over the selected track, the secondary actuator comprising;

    a substrate attached to the primary actuator;

    a plurality of electrically conductive stationary electrodes formed on the substrate; and

    a movable member formed of electrically conductive material and having (a) a frame connected to the substrate and supporting the head, and (b) a plurality of electrically conductive movable electrodes, the frame and supported head being connected to but electrically isolated from the movable electrodes.

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