MEMS optical switch with thermal actuator

• US 6,853,765 B1
• Filed: 03/31/2003
• Issued: 02/08/2005
• Est. Priority Date: 03/31/2003
• Status: Expired due to Fees

• Current Assignee: the united states of america as represented by the secretary of the navy
• Original Assignee: the united states of america as represented by the secretary of the navy
• Inventors: Cochran, Kevin
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Doan, Jennifer
• Application Number:
  US10/401,951
• Time in Patent Office: 680 Days
• Field of Search: 385 16- 19, 385 20- 23
• US Class Current: 385/23
• CPC Class Codes: G02B 6/3508 Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

Abstract

A MEMS type optical switch includes a substrate, the substrate including at least one groove formed therein; first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fibers; a thermal actuator disposed adjacent one of the first and second optical fibers, the thermal actuator comprising at least one v-beam, a pair of anchors connected to ends of the v-beam, and a yoke disposed in a central portion of the v-beam.

Claims

1. A MEMS type optical switch, comprising:

a substrate, the substrate including at least one groove formed therein;

first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fibers;

a thermal actuator disposed adjacent one of the first and second optical fibers, the thermal actuator comprising at least one v-beam, a pair of anchors connected to ends of the v-beam, and a yoke disposed in a central portion of the v-beam.

2. The switch of claim 1 wherein the thermal actuator comprises a plurality of v-beams.

3. The switch of claim 1 further comprising a second thermal actuator disposed adjacent the other of the first and second optical fibers, the at least one groove including a widened portion for movement of both the first and second optical fibers.

4. The switch of claim 1 wherein the first and second optical fibers are aligned when the switch is in an on state and wherein the first and second optical fibers are out of line when the switch is in an off state.

5. The switch of claim 1 wherein the anchors include metal plating on a top surface thereof.

6. The switch of claim 1 wherein the yoke is separate from the optical fibers.

7. The switch of claim 1 wherein the substrate, anchors, v-beams and yoke comprise silicon.