Fluidic device with integrated capacitive micromachined ultrasonic transducers
First Claim
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1. A fluidic device comprising.at least one microchannel, and at least one capacitive micromachined ultrasonic transducer formed in one wall of said microchannel.
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Abstract
The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.
128 Citations
24 Claims
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1. A fluidic device comprising.
at least one microchannel, and at least one capacitive micromachined ultrasonic transducer formed in one wall of said microchannel.
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3. A fluidic device comprising:
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a base of semiconductor material, at least one capacitive micromachined ultrasonic transducer formed in said base of semiconductor material, and a top having a microgroove sealed to said base with the microgroove over the ultrasonic transducer whereby to form a microchannel with an ultrasonic transducer in on wall of said channel. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A fluidic device comprising.
at least one microchannel having opposed walls, at least one capacitive micromachined ultrasonic transducer micromachined into one wall, and a flexible membrane on the opposite wall opposite the ultrasonic transducer whereby ultrasonic waves from the ultrasonic transducer are reflected back to the transducer by the flexible membrane.
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17. A fluidic device comprising.
a silicon base, one or more capacitive micromachined ultrasonic transducers formed into said base, and a top having a microgroove sealed to said base with the microgroove over said capacitive micromachined ultrasonic transducers.
Specification