High-vacuum valve with retractable valve plate to eliminate abrasion
First Claim
1. A high-vacuum valve comprisinga valve body having a flow channel;
- a composite valve plate disposed within said valve body and movable in a direction transverse to said flow channel between a closed position traversing said flow channel to prevent flow therethrough and an open position sufficiently clearing said flow channel to permit flow therethrough, said composite valve plate comprising;
a seal plate;
a support block;
a resilient connector having a first end affixed to one of said seal plate and said support block and a second end terminating in a chamber in the other of said seal plate and said support block, said resilient connector arranged such that when relaxed said resilient connector exerts an expanding force urging said seal plate and said support block apart;
sealing means disposed between said second end of said resilient connector and inner walls of said chamber; and
a passageway arranged to supply pressurized fluid to one side of said sealing means to thereby impose across said sealing means a pressure differential that compresses said resilient connector in opposition to said expanding force and thereby urges said seal plate and said support block toward each other; and
means for supplying pressurized fluid to said passageway and for releasing pressurized fluid therefrom upon command.
6 Assignments
0 Petitions
Accused Products
Abstract
A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mechanism. These results are attained by use of a composite valve plate that includes a sealing plate joined to a support block through a retractable resilient connector. During retraction, the sealing plate is drawing close to the block by a pneumatic actuator internal to the composite valve plate, the actuator arranged to oppose and overcome a mechanical resilient element also contained within the valve plate that urges the sealing plate outward from the support block to effect the seal when the actuator is not engaged.
39 Citations
18 Claims
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1. A high-vacuum valve comprising
a valve body having a flow channel; -
a composite valve plate disposed within said valve body and movable in a direction transverse to said flow channel between a closed position traversing said flow channel to prevent flow therethrough and an open position sufficiently clearing said flow channel to permit flow therethrough, said composite valve plate comprising;
a seal plate;
a support block;
a resilient connector having a first end affixed to one of said seal plate and said support block and a second end terminating in a chamber in the other of said seal plate and said support block, said resilient connector arranged such that when relaxed said resilient connector exerts an expanding force urging said seal plate and said support block apart;
sealing means disposed between said second end of said resilient connector and inner walls of said chamber; and
a passageway arranged to supply pressurized fluid to one side of said sealing means to thereby impose across said sealing means a pressure differential that compresses said resilient connector in opposition to said expanding force and thereby urges said seal plate and said support block toward each other; and
means for supplying pressurized fluid to said passageway and for releasing pressurized fluid therefrom upon command. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification