Semiconductor device and method of manufacturing semiconductor device

• US 6,856,023 B2
• Filed: 01/22/2003
• Issued: 02/15/2005
• Est. Priority Date: 01/22/2002
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Morimoto, Hiroyuki, Muta, Tadayoshi, Saito, Riichi, Takayama, Manabu, Suto, Tadanori, Tachikawa, Jin
• Primary Examiner(s): POTTER, ROY KARL
• Application Number:
  US10/347,937
• Publication Number:
  US 20030151144A1
• Time in Patent Office: 755 Days
• Field of Search: 257/774, 257/701, 257/702
• US Class Current: 257/774
• CPC Class Codes: H01L 21/76898 formed through a semiconductor substrate
• CPC Class Codes: H01L 2224/02371 connecting the bonding area on a surface of the semiconductor or solid-state body with another surface of the semiconductor or solid-state body
• CPC Class Codes: H01L 23/481 Internal lead connections, e.g. via connections, feedthrough structures
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/12044 OLED

Abstract

The semiconductor device of the present invention comprises a substrate; at least one through hole formed through the substrate between front and back surfaces of the substrate; an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of the substrate in a vicinity of an end opening of the through hole; an insulating layer formed of an organic material on an inside surface of the through hole; and an electroconductive layer formed on an inside surface of the insulating layer, wherein the electrical connection portion is electrically connected to the electroconductive layer to be electrically connected to a side of the other surface of the substrate.

Claims

1. A semiconductor device comprising:

a semiconductor substrate;

at least one through hole formed through said semiconductor substrate between front and back surfaces of said semiconductor substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said semiconductor substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein the organic material comprises a binder resin which is selected from a group consisting of a denatured epoxy resin, a polyamide resin, a polyimide resin, a maleimide resin, a polyimide-amide resin, a polyester resin, a polyether resin, a bisphenol resin, a denatured acrylic resin, a silicone resin, a fluorocarbon resin, and a melamine resin, or a resin mixture obtained by suitably combining these resins, and is cured at a temperature less than or equal to 4000°

C. with one of polymerization reaction-generated bonding, condensation reaction-generated bonding, addition reaction-generated bonding, urethane bonding, urea bonding, ester bonding, ether bonding, carbonate bonding, thiourethane bonding, thioester bonding, thioether bonding, amide bonding, unsaturated bonding, and siloxane bonding, and

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said semiconductor substrate.

2. The semiconductor device according to claim 1, wherein an aspect ratio of said through hole is in a range from 5 to 60.

3. The semiconductor device according to claim 1, wherein an inside diameter of said through hole is in a range from 5 μ

m to 100 gm.

4. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion as electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein said electrical connection portion is formed in a shape of a circular ring so as to encircle the opening end of said through hole.

5. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein said insulating layer is formed only on the inside surface of said through hole.

6. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein said electrical connection portion is adjacent to the opening end of said through hole.

7. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein said electrical connection portion is rectangular.

8. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein said electrical connection portion comprises wiring.

9. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein another electrical connection portion electrically connected to said electroconductive layer is also formed on the other surface of said substrate.

10. A semiconductor device comprising:

a substrate

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate, and

wherein a space inside the electroconductive layer formed in said through hole is filled with a filling material.

11. A semiconductor device comprising:

a substrate;

at least one through hole formed through said substrate between front and back surfaces of said substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said substrate in a vicinity of an end opening of said through hole;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said substrate,

wherein a space inside the electroconductive layer formed in said through hole is filled with a filling material, and

wherein said filling material is an insulating material.

12. A semiconductor device comprising:

a semiconductor substrate;

at least one groove formed in a side surface of said semiconductor substrate and connecting front and back surfaces of said semiconductor substrate;

an electrical connection portion formed by a semiconductor process on at least one surface of the front and back surfaces of said semiconductor substrate in a vicinity of an end of said groove;

an insulating layer formed of an organic material on at least an inside surface of said through hole; and

an electroconductive layer formed on at least an inside surface of said insulating layer,

wherein the organic material comprises a binder resin which is elected from a group consisting of a denatured epoxy resin, a polyamide resin, a polyimide resin, a maleimide resin, a polyimide-amide resin, a polyester resin, a polyether resin, a bisphenol resin, a denatured acrylic resin, a silicone resin, a fluorocarbon resin, and a melamine resin, or a resin mixture obtained by suitably combining these resins, and is cured at a temperature less than or equal to 400°

C. with one of polymerization reaction-generated bonding, condensation reaction-generated bonding, addition reaction-generated bonding, urethane bonding, urea bonding, ester bonding, ether bonding, carbonate bonding, thiourethane bonding, thioester bonding, thioether bonding, amide bonding, unsaturated bonding, and siloxane bonding, and

wherein said electrical connection portion is electrically connected to said electroconductive layer to be electrically connected to a side of the other surface of said semiconductor substrate.