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Probe card with coplanar daughter card

  • US 6,856,150 B2
  • Filed: 04/10/2001
  • Issued: 02/15/2005
  • Est. Priority Date: 04/10/2001
  • Status: Expired due to Fees
First Claim
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1. A probe card assembly for electrically communicating test data between a semiconductor test apparatus and a semiconductor device under test, said probe card assembly comprising:

  • a substrate configured to electrically contact said semiconductor tester apparatus, a plurality of probes configured to electrically contact said semiconductor device under test, said plurality of probes located to a first side of said substrate, a daughter card located to a second side of said substrate, and an electric circuit at least a portion of which is disposed on said daughter card, wherein said electric circuit receives as input test data received at said probe card assembly from one of said tester apparatus or said semiconductor device under test, enhances said test data, and outputs enhanced test data.

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