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Digital micromirror device having mirror-attached spring tips

  • US 6,856,446 B2
  • Filed: 12/12/2002
  • Issued: 02/15/2005
  • Est. Priority Date: 12/12/2001
  • Status: Active Grant
First Claim
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1. An array of digital micro pixel elements, comprising:

  • a mirror layer having a mirror associated with each pixel element;

    a hinge layer spaced under the mirror layer, the hinge layer having a torsion hinge under each mirror and attached to the mirror such that the mirror may tilt above the hinge layer; and

    an address layer spaced under the hinge layer, the address layer having circuitry for controlling operation of the pixel elements, wherein the hinge layer further has spring tips under each mirror and mechanically connected to and moveable with the mirror.

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