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Spatial light modulator

  • US 6,856,448 B2
  • Filed: 12/09/2003
  • Issued: 02/15/2005
  • Est. Priority Date: 03/26/2001
  • Status: Expired due to Term
First Claim
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1. A deformable mirror element for modulating an incident beam of light, the element comprising:

  • a substrate;

    an elongate support extending along the substrate and projecting outwardly therefrom, and a ribbon member, attached to the elongate support along a longitudinal portion of the ribbon member and extending transversely from the elongate support; and

    at least one slit formed transversely in the ribbon member, the slit for dividing the ribbon member into at least two reflective wing portions, the wing portions being elastically deformable towards the substrate on application of an actuation force.

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