MEMS variable inductor and capacitor

• US 6,856,499 B2
• Filed: 03/28/2003
• Issued: 02/15/2005
• Est. Priority Date: 03/28/2003
• Status: Expired due to Term

• Current Assignee: Northrop Grumman Systems Corporation (Northrop Grumman Corporation)
• Original Assignee: Northrop Grumman Corporation
• Inventors: Stokes, Robert B.
• Primary Examiner(s): Reichard, Dean A.
• Assistant Examiner(s): Ha, Nguyen T.
• Application Number:
  US10/402,032
• Publication Number:
  US 20040190217A1
• Time in Patent Office: 690 Days
• Field of Search: 361/277, 361/278, 361/279, 361/280, 361/283.2, 361/283.3, 361/290, 361/291, 361/292, 361/296, 361/299.1, 361/271, 361/272
• US Class Current: 361/277
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 2007/068 using printed circuit coils
• CPC Class Codes: H01F 21/04 by relative movement of turns or parts of windings
• CPC Class Codes: H01G 5/14 due to longitudinal movement of electrodes
• CPC Class Codes: H01G 5/18 due to change in inclination, e.g. by flexing, by spiral wrapping
• CPC Class Codes: H03H 2007/008 the MEMS being trimmable
• CPC Class Codes: H03H 7/0115 comprising only inductors and capacitors H03H7/075, H03H7/09, H03H7/12, H03H7/13 take precedence

Abstract

A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.

Claims

1. A variable passive component comprising:

a first conductive portion disposed on a substrate having a generally planar top surface; and

a second conductive portion disposed on a plate that is movable in a plane that is generally parallel to the top surface of the substrate, such that a gap is maintained between the second conductive portion and the first conductive portion, in which the overlap of the second conductive portion with respect to first conductive portion varies a component value of the variable passive component.

2. The component of claim 1, the variable passive component being an inductor.

3. The component of claim 2, the first conductive portion being a first inductor coupled to a circuit and the second conductive portion being a second inductor with shorted ends.

4. The component of claim 3, the effective inductance of the variable inductor being based on the amount of overlap of the second inductor over the first inductor, the amount of overlap of the second inductor with respect to the first inductor varying the magnetic coupling between the first inductor and the second inductor.

5. The component of claim 1, the variable passive component being a variable capacitor.

6. The component of claim 5, the first conductive portion being a first substrate capacitor pad and a second substrate capacitor pad and the second conductive portion being a movable capacitor pad that overlaps the first substrate capacitor pad and the second substrate capacitor pad, the first substrate capacitor pad and the movable capacitor pad forming a first capacitor and the second substrate capacitor pad and the movable capacitor pad forming a second capacitor that is in series with the first capacitor, in which the amount of overlap of the movable capacitor pad with respect to the first and second capacitor pads varies the area of the electric field between the movable capacitor pad and the first and second capacitor pads and the capacitance of the variable capacitor.

7. The component of claim 1, further comprising means for moving the dielectric plate between a plurality of overlapping positions.

8. The component of claim 1, further comprising a linear actuator operative to move the dielectric plate between a plurality of overlapping positions, such that no direct connections are necessary to any electrodes on the movable dielectric sheet.

9. The component of claim 8, the linear actuator being a three-phase stepper actuator.

10. The component of claim 8, the linear actuator being a pushrod and tooth linear actuator system.

11. A microelectromechanical system (MEMS) device comprising the component of claim 1.

12. A tunable filter comprising the MEMS device of claim 10.

13. A variable passive component comprising:

a first inductor formed on a substrate having a generally planar top surface;

a second inductor formed on a plate that is movable along a plane that is generally parallel to the top surface, such that a gap is maintained between the second inductor and the first inductor; and

a linear actuator that moves the plate between a plurality of positions to vary an overlap of the second inductor with respect to the first inductor, the effective inductance of the first inductor being based on the amount of overlap of the second inductor over the first inductor.

14. The variable passive component of claim 13, the effective inductance being substantially equal to (1−

K²) the self inductance of the first inductor, where K is the magnetic coupling coefficient of the second inductor with respect to the first inductor.

15. The variable passive component of claim 13, the second inductor having shorted ends.

16. A tunable filter comprising the variable passive component of claim 13.

17. The variable passive component of claim 16, further comprising a plurality of variable inductors having associated substrate inductors and movable plate inductors.

18. The variable passive component of claim 16, further comprising a variable capacitor having an overlapping movable capacitor pad and a pair of adjacent substrate capacitor pads with a gap formed therebetween, the capacitance of the variable capacitor being varied by the amount of overlap of the movable capacitor pad over the pair of adjacent substrate capacitor pads.

19. A variable passive component comprising:

a first capacitor pad formed on a substrate having a generally planar top surface;

a second capacitor pad formed on the substrate adjacent the first capacitor pad;

a movable capacitor pad that is movable in a plane that is generally parallel to the top surface of the substrate, such that a gap is maintained between the movable capacitor pad and the first and second capacitor pads, the first capacitor pad and the movable capacitor pad forming a first capacitor and the second capacitor pad and the movable capacitor pad forming a second capacitor in series with the first capacitor to provide a variable capacitor; and

a linear actuator that moves the movable capacitor pad between a plurality of positions to vary an overlap of the movable capacitor pad with respect to the first capacitor pad and the second capacitor pad to vary the capacitance of the variable capacitor.

20. The variable passive component of claim 19, further comprising a plurality of variable capacitors having associated substrate capacitor pads and movable capacitor pads.

21. The variable passive component of claim 19, further comprising a variable inductor having a shorted inductor disposed on a movable plate and an inductor formed on the substrate, the inductance of the inductor being varied by the amount of overlap of the shorted inductor over the substrate inductor.

22. A tunable filter comprising the variable passive component of claim 21.

23. A digital synthesizer comprising the tunable filter of claim 22.

24. A receiver comprising the tunable filter of claim 22.

25. A method for providing a variable passive component, the method comprising:

fabricating a first conductive portion on a generally planar top surface of a substrate; and

fabricating a second conductive portion on a first end of a plate; and

disposing the plate such that the plate is movable along a plane generally parallel to the top surface of the substrate to vary an overlap of the second conductive portion with respect to first conductive portion and maintain a gap therebetween, in which the component value of the variable passive component varies based on the amount of overlap of the second conductive portion over the first conductive portion.

26. The method of claim 25, the variable passive component being one of an inductor and a capacitor.

27. The method of claim 25, further comprising determining a desired component value and moving the second conductive portion over the first conductive portion at a desired overlapping position to achieve the desired component value.

28. The method of claim 25, the plate being movable to a plurality of different overlapping positions to provide 20:

1 component values.

29. The method of claim 25, the plate being movable to a plurality of different overlapping positions to provide 10:

1 component values.

30. The method of claim 25, the dielectric plate being movable via a linear actuator to a plurality of different overlapping positions, such that no direct connections are necessary to any electrodes on the movable plate.