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Resonator arrangement for bandwidth control

  • US 6,856,638 B2
  • Filed: 10/19/2001
  • Issued: 02/15/2005
  • Est. Priority Date: 10/23/2000
  • Status: Expired due to Fees
First Claim
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1. An excimer or molecular fluorine laser system, comprising:

  • a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas;

    a plurality of electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture;

    a resonator including a pair of resonator reflecting surfaces disposed on either side of the discharge chamber for generating a laser beam, said resonator further including a deformable third reflecting surface disposed between the pair of resonator reflecting surfaces;

    a line-narrowing/selection unit within the resonator for narrowing the bandwidth of the laser beam;

    a detector for detecting the bandwidth of the laser beam; and

    a processor for receiving a signal indicative of said bandwidth from said detector and controlling a surface contour of said deformable third reflecting surface to control said bandwidth in a feedback arrangement.

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