Apparatus and method for inspecting a board used in a liquid crystal panel
First Claim
1. An inspection apparatus for inspecting a board used in a liquid crystal panel, in which a liquid crystal driving signal is applied to said board to cause a potential variation in an electrode of said board, and said potential variation is detected in a non-contact manner, said inspection apparatus comprising:
- detect means for detecting the potential variation in said electrode by use of a plurality of sensor elements; and
select means for outputting a select signal for selecting said sensor elements, wherein each of said sensor elements is formed on a single crystal of a semiconductor or on a flat plate, and each of said sensor elements includes;
a passive device operable as a counter electrode coupled capacitively with said electrode to detect the potential variation in said electrode and generate a detect signal, and a transistor adapted to output said detect signal in response to said select signal.
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Accused Products
Abstract
The present invention provides an inspection apparatus and inspection method capable of inspecting the shape of a board used in a liquid crystal panel with high fineness and efficiency. A computer 21 controls an X-electrode select section 22 and a Y-electrode select section 23 to drive liquid crystal driving electrodes 102 selectively. A FLASHSHOCK Sensor 1 is located at a position opposed to a board 100 in a non-contact manner. The FLASHSHOCK Sensor 1 is adapted to detect each potential variation caused in the liquid crystal electrodes 101-104 and then output the detected potential variation to the computer 21 as a detect signal. The computer 21 receives the detect signal from the FLASHSHOCK Sensor 1 to create image data, and detects disconnection, short-circuit, chipping or the like in the liquid crystal electrodes based on the created image data. Further, the computer 21 displays an image representing each shape of the liquid crystal electrodes on a display 21a.
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Citations
12 Claims
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1. An inspection apparatus for inspecting a board used in a liquid crystal panel, in which a liquid crystal driving signal is applied to said board to cause a potential variation in an electrode of said board, and said potential variation is detected in a non-contact manner, said inspection apparatus comprising:
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detect means for detecting the potential variation in said electrode by use of a plurality of sensor elements; and
select means for outputting a select signal for selecting said sensor elements, wherein each of said sensor elements is formed on a single crystal of a semiconductor or on a flat plate, and each of said sensor elements includes;
a passive device operable as a counter electrode coupled capacitively with said electrode to detect the potential variation in said electrode and generate a detect signal, and a transistor adapted to output said detect signal in response to said select signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for inspecting a board used in a liquid crystal panel, in which a liquid crystal driving signal is applied to said board to cause a potential variation in an electrode of a board used in said liquid crystal panel, wherein
each of a plurality of sensor elements is formed on a single crystal of a semiconductor or on a flat plate, and each of said sensor elements includes a passive device and a transistor, said method including; -
locating said plurality of sensor elements without contact near said board;
applying a liquid crystal driving signal to said board to cause a potential variation in an electrode of said board;
coupling, as a counter electrode, said passive device with said electrode of said board to detect a potential variation in said board electrode, said coupling being effected in a non-contact manner; and
using said transistor to output a detect signal from said passive device.
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Specification