Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
First Claim
1. A material system investigating system comprising a source of electromagnetic radiation, a means for supporting a sample system, and a detector, such that in use a beam of electromagnetic radiation is provided by said source of electromagnetic radiation and is caused to reflect from a sample system placed on said means for supporting a sample system and enter said detector, said material system investigating system further comprising at least one electromagnetic beam intercepting angle-of-incidence changing system comprising elements which are easily functionally entered into the locus of the electromagnetic beam on both sides of said sample system, which at least one electromagnetic beam intercepting angle-of-incidence changing system serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, but at an angle-of-incidence which is different than that when said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, said at least one electromagnetic beam intercepting angle-of-incidence changing system not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one electromagnetic beam intercepting angle-of-incidence changing system, on either side of said means for supporting a sample system, hence does not require said material system investigating system to comprise multiple sources and detectors or the change of position of at least one selection from the group consisting of:
- said source of electromagnetic radiations and said detector thereof;
to effect change said angle-of-incidence.
1 Assignment
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Accused Products
Abstract
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
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Citations
19 Claims
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1. A material system investigating system comprising a source of electromagnetic radiation, a means for supporting a sample system, and a detector, such that in use a beam of electromagnetic radiation is provided by said source of electromagnetic radiation and is caused to reflect from a sample system placed on said means for supporting a sample system and enter said detector, said material system investigating system further comprising at least one electromagnetic beam intercepting angle-of-incidence changing system comprising elements which are easily functionally entered into the locus of the electromagnetic beam on both sides of said sample system, which at least one electromagnetic beam intercepting angle-of-incidence changing system serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, but at an angle-of-incidence which is different than that when said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, said at least one electromagnetic beam intercepting angle-of-incidence changing system not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one electromagnetic beam intercepting angle-of-incidence changing system, on either side of said means for supporting a sample system, hence does not require said material system investigating system to comprise multiple sources and detectors or the change of position of at least one selection from the group consisting of:
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said source of electromagnetic radiations and said detector thereof;
to effect change said angle-of-incidence. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of calibrating a material system investigation system comprising the steps of:
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a. providing a material system investigation system comprising a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, an analyzer, a dispersive optics and at least one detector system which contains a multiplicity of detector elements, said material system investigation system optionally comprising at least one compensator(s) positioned at a location selected from the group consisting of;
before said stage for supporting a sample system; and
after said stage for supporting a sample system; and
both before and after said stage for supporting a sample system;
such that when said material system investigation system is used to investigate a sample system present on said stage for supporting a sample system, at least one selection from the group consisting of;
said analyzer;
said polarizer; and
at least one of said at least one compensators);
is/are caused to continuously rotate while a polychromatic beam of electromagnetic radiation produced by said source of a polychromatic beam of electromagnetic radiation is caused to pass through said polarizer and said compensator(s), said polychromatic beam of electromagnetic radiation being also caused to interact with said sample system, pass through said analyzer and interact with said dispersive optics such that a multiplicity of essentially single wavelengths are caused to simultaneously enter a corresponding multiplicity of detector elements in said at least one detector system;
said material system investigating system further comprising at least one angle-of-incidence changing system which is easily functionally entered into the locus of the electromagnetic beam on both sides of said means for supporting a sample system, which at least one angle-of-incidence changing system serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one angle-of-incidence changing system is not present, but at an angle-of-incidence which is different when said at least one angle-of-incidence changing system is and is not functionally present, said at least one angle-of-incidence changing system not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one angle-of-incidence changing system, on either side of said means for supporting a sample system, hence does not require multiple sources and detectors or change of position of at least one selection from the group consisting of;
said source of electromagnetic radiation; and
said detector thereof;
to effect change said angle-of-incidence;
b. along with step a., developing a mathematical model of said material system investigation system which comprises as calibration parameter variables selections from the group consisting of;
polarizer azimuthal angle orientation;
present sample system PSI;
present sample system DELTA;
compensator azimuthal angle orientation(s);
matrix components of said compensator(s); and
analyzer azimuthal angle orientation;
angle-of-incidence changing system representation;
which mathematical model is effectively a transfer function which enables calculation of electromagnetic beam intensity as a function of wavelength detected by a detector element, given intensity as a function of wavelength provided by said source of a polychromatic beam of electromagnetic radiation;
c. causing a polychromatic beam of electromagnetic radiation produced by said source of a polychromatic beam of electromagnetic radiation, to pass through said polarizer, interact with a sample system caused to be in the path thereof, pass through said analyzer, and interact with said dispersive optics such that a multiplicity of essentially single wavelengths are caused to simultaneously enter a corresponding multiplicity of detector elements in said at least one detector system, with said polychromatic beam of electromagnetic radiation also being caused to pass through present compensator(s);
d. obtaining an at least two dimensional data set of intensity values vs. wavelength and a parameter selected from the group consisting of;
angle-of-incidence of said polychromatic beam of electromagnetic radiation with respect to a present sample system, and azimuthal angle rotation of at least one element selected from the group consisting of;
said polarizer; and
said analyzer;
at least one of said at least one compensator(s);
while at least one selection from the group consisting ofsaid polarizer; and
said analyzer;
at least one of said at least one compensator(s);
is caused to continuously rotate;
e. performing a mathematical regression of said mathematical model onto said at least two dimensional data set, thereby evaluating calibration parameters in said mathematical model;
said regression based calibration procedure evaluated calibration parameters serving to compensate said mathematical model for non-achromatic characteristics and non-idealities of said compensator(s), and for azimuthal angles of said polarizer, analyzer and compensator(s) and for said angle-of-incidence changing system. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A sample system investigation system for application in investigating a sample system with electromagnetic radiation, sequentially comprising:
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a. a source of a beam electromagnetic radiation;
b. a polarizer element;
c. optionally a compensator element;
d. additional element(s);
e. a sample system;
f. additional element(s);
g. optionally a compensator element;
h. an Analyzer element; and
i. a Detector System;
wherein said additional component(s) in d. and f. each comprise at least one electromagnetic beam intercepting angle-of-incidence changing system element which can be easily entered into the locus of the electromagnetic beam on both sides of said sample system, which at least one electromagnetic beam intercepting angle-of-incidence changing system elements serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one electromagnetic beam intercepting angle-of-incidence changing system elements are not present, but at an angle-of-incidence which is different than that when said at least one electromagnetic beam intercepting angle-of-incidence changing system is not present, said at least one electromagnetic beam intercepting angle-of-incidence changing system elements not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one electromagnetic beam intercepting angle-of-Incidence changing system elements, on either side thereof, hence does not require multiple sources and detectors or change of position of at least one selection from the group consisting of; said source of electromagnetic radiation; and
said detector thereof;
to effect change said angle-of-incidence. - View Dependent Claims (19)
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Specification