Self assembled micro anti-stiction structure
First Claim
1. A method for reducing suction in a MEMS device having a moveable element moveably coupled to a substrate, the method comprising:
- a) providing the substrate with an anti-stiction member; and
b) interposing the anti-stiction member between the moveable element and the substrate, wherein step b) includes actuating the moveable element to interpose the anti-stiction member between the moveable element and the substrate.
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Accused Products
Abstract
A method and apparatus are described for reducing stiction in a MEMS device having a movable element and a substrate. The method generally comprises providing the substrate with an anti-stiction member and interposing the anti-stiction member between the moveable element and the substrate. The apparatus generally comprises an anti-stiction member that is interposable between the moveable element and the substrate. Another embodiment of the invention of the invention is directed to a MEMS device, comprising: a substrate, a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate. A further embodiment of the invention is directed to an optical switch having one or more moveable elements moveably coupled to a substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate. The anti-stiction member may be in the form of a flexible cantilevered structure that overhangs the moveable element. Actuating the moveable element causes the anti-stiction member to flex and snap into place between the moveable element and the substrate. An additional embodiment of the invention is directed to a method of fabricating a MEMS device. The method proceeds by providing a silicon-on-insulator (SOI) substrate; defining a moveable element from a device layer of the SOI substrate; and depositing a flexible material over the device layer and the moveable element. One or more portions of the flexible material overhang the moveable element, whereby the flexible material forms one or more anti-stiction members.
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Citations
34 Claims
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1. A method for reducing suction in a MEMS device having a moveable element moveably coupled to a substrate, the method comprising:
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a) providing the substrate with an anti-stiction member; and
b) interposing the anti-stiction member between the moveable element and the substrate, wherein step b) includes actuating the moveable element to interpose the anti-stiction member between the moveable element and the substrate. - View Dependent Claims (2)
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3. A method for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the method comprising:
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a) providing the substrate with an anti-stiction member; and
b) interposing the anti-stiction member between the moveable element and the substrate, wherein step a) includes providing an anti-stiction member that overhangs the moveable element. - View Dependent Claims (4, 5, 6, 7, 8)
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9. A method for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the method comprising:
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a) providing the substrate with an anti-stiction member; and
b) interposing the anti-stiction member between the moveable element and the substrate, wherein step a) includes;
providing a silicon-on-insulator (SOI) substrate;
forming the moveable element from a device layer of the SOI substrate; and
depositing a flexible material over the device layer and the moveable element such that the flexible material overhangs the moveable element.
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10. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, wherein the anti-stiction member is cantilevered such that the anti-stiction member overhangs the moveable element.
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11. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, wherein the anti-stiction member is made from a flexible material.
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12. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, wherein the anti-stiction member includes one or more flexible portions disposed between a fixed end and a free end of the anti-stiction member. - View Dependent Claims (13, 14)
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15. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, further comprising a standoff attached to a free end of the anti-stiction member.
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16. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, further comprising means for electrically isolating the moveable element from a portion of the substrate, wherein the means for electrically isolating includes an electrically insulating standoff attached to a free end of the anti-stiction member.
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17. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, further comprising means for electrically isolating the moveable element from a portion of the substrate, wherein the anti-stiction member includes a serpentine shaped portion that is disposed between a free end and a fixed end of the anti-stiction member.
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18. An apparatus for reducing stiction in a MEMS device having a moveable element moveably coupled to a substrate, the apparatus comprising:
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an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is attached to the substrate, wherein the anti-stiction member is not attached to the moveable element, further comprising means for electrically isolating the moveable element from a portion of the substrate, wherein the anti-stiction member includes one or more double-serpentine shaped portions that are disposed between a free end and a fixed end of the anti-stiction member.
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19. A MEMS device, comprising:
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a substrate;
a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is cantilevered such that the anti-stiction member overhangs the moveable element.
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20. A MEMS device, comprising:
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a substrate;
a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member is made from a flexible material.
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21. A MEMS device, comprising:
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a substrate;
a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate, wherein the anti-stiction member includes one or more flexible portions disposed between a fixed end and a free end of the anti-stiction member. - View Dependent Claims (22, 23)
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24. A MEMS device, comprising:
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a substrate;
a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate, further comprising a standoff attached to a free end of the anti-stiction member.
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25. A MEMS device, comprising:
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a substrate;
a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate, further comprising means for electrically isolating the moveable element from a portion of the substrate, wherein the means for electrically isolating includes an electrically insulating standoff attached to a free end of the anti-stiction member. - View Dependent Claims (26)
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27. A method for fabricating a MEMS device, comprising:
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providing a silicon-on-insulator (SOI) substrate;
forming a moveable element from a device layer of the SOI substrate;
forming a sacrificial layer over the moveable element and a portion of the device layer anddepositing a flexible material over the sacrificial layer, the device layer and the moveable element such that one or more portions of the flexible material overhang the moveable element to form an anti-stiction member, wherein the flexible material is deposited such that the anti-stiction member is attached to one end to a portion of the device layer, wherein the flexible material is deposited such that the anti-stiction member is not attached to the moveable element; and
etching the sacrificial layer to release the moveable element,whereby the flexible material forms one or more anti-stiction members. - View Dependent Claims (28)
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29. An optical switch, comprising:
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a substrate;
one or more moveable elements moveably coupled to the substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate, wherein the anti-stiction member is cantilevered such that the anti-stiction member overhangs the moveable element.
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30. An optical switch, comprising:
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a substrate;
one or more moveable elements moveably coupled to the substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate, wherein the anti-stiction member is made from a flexible material.
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31. An optical switch, comprising:
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a substrate;
one or more moveable elements moveably coupled to the substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate, wherein the anti-stiction member includes one or more flexible portions disposed between a fixed end and a free end of the anti-stiction member. - View Dependent Claims (32, 33)
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34. An optical switch, comprising:
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a substrate;
one or more moveable elements moveably coupled to the substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate, further comprising a standoff attached to a free end of the anti-stiction member.
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Specification