Systems and methods for overcoming stiction using a lever
First Claim
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1. A method for manipulating a first plate in a MEMS device relative to a second plate in a MEMS device, the method comprising:
- providing a first actuator and a second actuator disposed above a base layer;
providing the first plate supported by a first pivot, wherein the first plate is disposed above the first actuator and the first pivot is disposed above the base layer between the first actuator and the second actuator;
providing a second plate supported by a second pivot wherein the second plate is disposed above the second actuator and the second pivot is disposed above the base layer;
activating the second actuator to cause the second plate to impact the first plate;
wherein the first plate comprises a mirror, and wherein the second plate comprises a mirror.
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Abstract
A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.
56 Citations
13 Claims
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1. A method for manipulating a first plate in a MEMS device relative to a second plate in a MEMS device, the method comprising:
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providing a first actuator and a second actuator disposed above a base layer;
providing the first plate supported by a first pivot, wherein the first plate is disposed above the first actuator and the first pivot is disposed above the base layer between the first actuator and the second actuator;
providing a second plate supported by a second pivot wherein the second plate is disposed above the second actuator and the second pivot is disposed above the base layer;
activating the second actuator to cause the second plate to impact the first plate;
wherein the first plate comprises a mirror, and wherein the second plate comprises a mirror. - View Dependent Claims (2, 3)
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4. An apparatus adapted for encouraging a structural plate in a MEMS device to deflect toward a static position, the apparatus comprising:
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a base layer;
a first pivot and a second pivot disposed on the base layer;
a first structural plate supported by the first pivot and disposed above the base layer, wherein the first structural plate is deflected away from the static position;
a second structural plate supported by the second pivot and disposed above the base layer; and
wherein the second structural plate is movable to generate a physical force, and wherein the physical force encourages the first structural plate to move toward the static position. - View Dependent Claims (5, 6)
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7. A MEMS device adapted for overcoming a stiction force incident at a stop position, the device comprising:
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a base layer;
a first plate supported by a first pivot, wherein the first plate is disposed above the base layer and the first pivot is disposed on the base layer;
a second plate supported by a second pivot, wherein the second plate is disposed above the base layer and the second pivot is disposed on the base layer;
a first actuator for deflecting the first plate and a second actuator for deflecting the second plate, wherein the first actuator is electrically connected to the second actuator; and
wherein energizing the first and second actuators causes the first plate to deflect away from the second plate and the second plate to deflect away from the first plate.
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8. A method for generating a physical force in an electro-mechanical device, the method comprising:
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providing a base layer;
providing a first pivot and a second pivot disposed on the base layer;
providing a first structural plate supported by the first pivot and disposed above the base layer;
providing a second structural plate supported by the second pivot and disposed above the base layer; and
deflecting the second structural plate to contact the first structural plate;
wherein deflecting the second structural plate is caused, at least in part, by a restorative force between the second structural plate and the second pivot. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification