Method and apparatus for wafer level testing of integrated optical waveguide circuits
First Claim
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1. A method of testing a planar lightwave circuit comprising:
- coupling a first optical probe having a side-polished optical fiber to the planar lightwave circuit; and
testing an optical pathway within the planar lightwave circuit by transmitting or receiving light through the first optical probe, wherein testing the optical pathway within the planar lightwave circuit is performed on a wafer prior to dicing the PLC wafer.
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Abstract
A method of testing a planar lightwave circuit is achieved by coupling an optical probe to the planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.
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Citations
14 Claims
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1. A method of testing a planar lightwave circuit comprising:
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coupling a first optical probe having a side-polished optical fiber to the planar lightwave circuit; and
testing an optical pathway within the planar lightwave circuit by transmitting or receiving light through the first optical probe, wherein testing the optical pathway within the planar lightwave circuit is performed on a wafer prior to dicing the PLC wafer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of testing a planar lightwave circuit comprising:
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coupling a first optical probe to a first portion of the planar lightwave circuit;
directing a light beam through the first optical probe into the planar lightwave circuit;
coupling a second optical probe to a second portion of the planar lightwave circuit; and
receiving the light beam through the second optical probe, wherein the first and second optical probes comprise side-polished optical fibers. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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Specification