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Method and apparatus for wafer level testing of integrated optical waveguide circuits

  • US 6,859,587 B2
  • Filed: 12/28/2001
  • Issued: 02/22/2005
  • Est. Priority Date: 12/28/2001
  • Status: Expired due to Fees
First Claim
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1. A method of testing a planar lightwave circuit comprising:

  • coupling a first optical probe having a side-polished optical fiber to the planar lightwave circuit; and

    testing an optical pathway within the planar lightwave circuit by transmitting or receiving light through the first optical probe, wherein testing the optical pathway within the planar lightwave circuit is performed on a wafer prior to dicing the PLC wafer.

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