Semiconductor factory automation system and method for monitoring at least one server in real time
First Claim
1. A semiconductor factory automation (FA) system, comprising:
- at least one processor, which is coupled to at least one semiconductor processing means for processing a semiconductor wafer cassette containing a predetermined number of semiconductor wafers, each for driving a program process and providing processor state information, wherein the processor state information includes an availability of a central processing unit related to said processor, an availability of a disk related to said processor, and a state of the program process related to said processor;
storing means for storing the processor state information in real time;
monitoring means for retrieving the processor state information stored in said storing means in order to monitor said processor in real time; and
displaying means for displaying the processor state information retrieved.
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Abstract
A method for monitoring at least one server in a semiconductor factory automation (FA) system, includes the steps of: a) providing server state information from at least one server to a real-time database, wherein the server state information includes an availability of a central processing unit, an availability of a disk and a state of a program process related to the server; b) storing the processor state information in the real-time database; c) retrieving the server state information to monitor the server; and d) displaying the server state information retrieved. Therefore, the method monitors at least one server in a real time so that an operator can easily locate a failure of at least one-server.
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Citations
13 Claims
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1. A semiconductor factory automation (FA) system, comprising:
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at least one processor, which is coupled to at least one semiconductor processing means for processing a semiconductor wafer cassette containing a predetermined number of semiconductor wafers, each for driving a program process and providing processor state information, wherein the processor state information includes an availability of a central processing unit related to said processor, an availability of a disk related to said processor, and a state of the program process related to said processor;
storing means for storing the processor state information in real time;
monitoring means for retrieving the processor state information stored in said storing means in order to monitor said processor in real time; and
displaying means for displaying the processor state information retrieved. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for monitoring at least one server in a semiconductor factory automation (FA) system, comprising the steps of:
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a) providing server state information from at least one server, which is coupled to at least one semiconductor processing means, to a real-time database, wherein the server state information includes an availability of a central processing unit related to the server, an availability of a disk related to the server, and a state of a program process related to the server;
b) storing the server state information in the real-time database;
c) retrieving the server state information stored in the real-time database to monitor the server, and d) displaying the server state information retrieved in real time. - View Dependent Claims (8, 9, 10)
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11. A semiconductor factory automation (FA) system, comprising:
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a plurality of processors, each coupled to a plurality of semiconductor processing means for processing a semiconductor wafer cassette containing a predetermined number of semiconductor wafers, said plurality of processors for driving a plurality of program processes, respectively, and providing respective processor state information, wherein for each of said plurality of processors the processor state information respectively includes an availability of a central processing unit related to said processor, an availability of a disk related to said processor, and a state of the program process related to said processor;
storing means for storing the processor state information of said plurality of processors in real time;
monitoring means for retrieving the processor state information stored in said storing means in order to monitor said plurality of processors in real time; and
displaying means for displaying the processor state information retrieved, said displaying means including, for each processor, a first display space for displaying the availability of the central processing unit related to said processor; and
a second display space for displaying the availability of the disk related to said processor. - View Dependent Claims (12, 13)
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Specification