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Semiconductor factory automation system and method for monitoring at least one server in real time

  • US 6,859,675 B1
  • Filed: 06/22/2000
  • Issued: 02/22/2005
  • Est. Priority Date: 06/22/1999
  • Status: Expired due to Term
First Claim
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1. A semiconductor factory automation (FA) system, comprising:

  • at least one processor, which is coupled to at least one semiconductor processing means for processing a semiconductor wafer cassette containing a predetermined number of semiconductor wafers, each for driving a program process and providing processor state information, wherein the processor state information includes an availability of a central processing unit related to said processor, an availability of a disk related to said processor, and a state of the program process related to said processor;

    storing means for storing the processor state information in real time;

    monitoring means for retrieving the processor state information stored in said storing means in order to monitor said processor in real time; and

    displaying means for displaying the processor state information retrieved.

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