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Planar inertial measurement units based on gyros and accelerometers with a common structure

  • US 6,859,751 B2
  • Filed: 12/17/2002
  • Issued: 02/22/2005
  • Est. Priority Date: 12/17/2001
  • Status: Expired due to Fees
First Claim
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1. A planar, integrated inertial measurement unit (IMU) comprising a plurality of inertial measurement instruments that are based on a common structure, the IMU comprising:

  • at least two coplanar inertial measurement instruments, each instrument comprising;

    a case;

    a planar outer member coupled to the case by flexures, and that is driven angularly to oscillate about a drive axis with respect to the case; and

    a planar inner member coplanar with the outer member and coupled to the outer member by flexures, and that rotates about an output axis that is orthogonal to the drive axis in response to the acceleration or rotation rate of the IMU.

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