Microgyroscope tunable for translational acceleration
First Claim
1. A microgyroscope tunable against an external translational acceleration, comprising:
- an oscillating mass floating over a wafer to oscillate in a first direction;
a driving electrode for oscillating the oscillating mass;
a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction;
a sensing electrode for sensing a motion of the sensing mass; and
a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass.
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Abstract
A microgyroscope tunable against an external translational acceleration includes an oscillating mass floating over a wafer to oscillate in a first direction, a driving electrode for oscillating the oscillating mass, a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction, a sensing electrode for sensing a motion of the sensing mass, and a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass. A microgyroscope according to the present invention is able to prevent sensing signals due to an external disturbance, such as noise or impulse.
51 Citations
10 Claims
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1. A microgyroscope tunable against an external translational acceleration, comprising:
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an oscillating mass floating over a wafer to oscillate in a first direction;
a driving electrode for oscillating the oscillating mass;
a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction;
a sensing electrode for sensing a motion of the sensing mass; and
a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass. - View Dependent Claims (2, 3)
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4. A microgyroscope tunable against an external translational acceleration, comprising:
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an oscillating mass floating over a wafer to oscillate in a first direction;
a plurality of first comb units arranged on an external side of the oscillating mass;
at least one driving electrode unit having a plurality of second comb units arranged between the first comb units at predetermined intervals to oscillate the outer gimbals oscillating mass;
a sensing mass movably arranged in the oscillating mass to oscillate together with the oscillating mass, while concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction;
a plurality of third comb units arranged in the second direction in one or more divisions defined in an interior of the sensing mass;
at least one sensing electrode unit arranged in the divisions of the sensing mass, and having a plurality of electrode comb units that are arranged between the third comb units of the divisions at predetermined intervals; and
a sensing electrode supporting portion for movably securing the sensing electrode unit such that the sensing electrode unit is moved in the second direction with the sensing mass. - View Dependent Claims (5, 6, 7, 8, 9, 10)
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Specification