Three-dimensional shape measuring method, and three-dimensional shape measuring apparatus
First Claim
1. A three-dimensional shape measuring method using a light-section method, comprising the steps of:
- producing a slit light from an optical system having a light source;
stopping said slit light asymmetrically in a slit direction and a direction perpendicular thereto;
projecting said slit light onto an object for measurement;
detecting said slit light as reflected by said object; and
measuring a three-dimensional shape of said object on the basis of said reflected slit light.
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Accused Products
Abstract
A three-dimensional shape measuring method and a three-dimensional shape measuring apparatus of excellent measurement accuracy. An optical system comprises a light source, a pattern forming unit which is disposed on the optical axis of the light source to form slit light from the light from the light source, and a projection lens to collect the slit light on the object for measurement. An asymmetric diaphragm having an aperture in which the size in the direction perpendicular to the slit direction is smaller than the size in the slit direction is provided in order to stop the slit light. An image pickup optical system is provided to measure the three-dimensional shape of the object for measurement on the basis of the slit light reflected from the object for measurement.
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Citations
28 Claims
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1. A three-dimensional shape measuring method using a light-section method, comprising the steps of:
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producing a slit light from an optical system having a light source;
stopping said slit light asymmetrically in a slit direction and a direction perpendicular thereto;
projecting said slit light onto an object for measurement;
detecting said slit light as reflected by said object; and
measuring a three-dimensional shape of said object on the basis of said reflected slit light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A three-dimensional shape measuring apparatus comprising:
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an optical system having a light source, a pattern forming unit which is disposed on the optical axis of said light source to form a slit light using the light from said light source, and a projection lens to collect the slit light on an object for measurement;
an asymmetric diaphragm having an aperture to stop said slit light asymmetrically in a slit direction and a direction perpendicular thereto; and
a detection unit which measures a three-dimensional shape of said object for measurement on the basis of said slit light as reflected from said object for measurement. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification