High performance micromirror arrays and methods of manufacturing the same
First Claim
1. An array of electromechanical micromirror devices comprising a plurality of electromechanical micromirror devices disposed in a 1-dimensional or 2-dimensional array, comprising:
- a device substrate with a 1st surface and a 2nd surface;
control circuitry disposed on said 1st surface of said substrate; and
an array of micromirror sections disposed on said 2nd surface of said substrate, wherein each said micromirror section comprises;
a micromirror whose reflective surface is substantially planar when said micromirror is in its undeflected state, with neither recesses nor protrusions; and
at least 1 support structure for supporting said micromirror.
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Abstract
A 1 dimensional or 2 dimensional array of micromirror devices comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface and a plurality of micromirrors disposed on said 2nd surface. Each micromirror comprises a reflective surface that is substantially optically flat, with neither recesses nor protrusions. Such a 1 dimensional or 2 dimensional array of micromirror devices may be used as a spatial light modulator (SLM). Methods of fabricating arrays of micromirror devices are also disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, and fabricating micromirrors on the 2nd surface, such that the reflective surfaces of the micromirrors are substantially optically flat, with neither recesses nor protrusions.
142 Citations
48 Claims
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1. An array of electromechanical micromirror devices comprising a plurality of electromechanical micromirror devices disposed in a 1-dimensional or 2-dimensional array, comprising:
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a device substrate with a 1st surface and a 2nd surface;
control circuitry disposed on said 1st surface of said substrate; and
an array of micromirror sections disposed on said 2nd surface of said substrate, wherein each said micromirror section comprises;
a micromirror whose reflective surface is substantially planar when said micromirror is in its undeflected state, with neither recesses nor protrusions; and
at least 1 support structure for supporting said micromirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of fabricating an array of electromechanical micromirror devices, comprising the steps of:
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providing a device substrate with a 1st surface and a 2nd surface;
forming control circuitry on said 1st surface of said substrate; and
forming a plurality of micromirror sections on said 2nd surface of said substrate, comprising the steps of;
forming a plurality of support structures for supporting micromirrors; and
forming a plurality of micromirrors such that each micromirror has a reflective surface that is substantially planar when said micromirror is in its undeflected state, with neither recesses nor protrusions. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A method of fabricating an array of electromechanical micromirror devices, comprising the steps of:
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providing a silicon-on-insulator substrate with an epitaxial top silicon layer, an insulator layer, and a bottom silicon layer;
forming control circuitry on said epitaxial top silicon layer;
removing said bottom silicon layer, thereby exposing the insulator layer; and
forming a plurality of micromirror sections on said exposed insulator layer, comprising the steps of;
forming a plurality of support structures for supporting micromirrors; and
forming a plurality of micromirrors whose reflective surface is substantially optically flat when said micromirror is in its undeflected state, with neither recesses nor protrusions. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47, 48)
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Specification