Enhanced preventative maintenance system and method of use
First Claim
1. An enhanced system for use in generating a PM (preventative maintenance) schedule for an automated equipment facility comprising:
- at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor, to analyze attrition rate data, and to determine an attrition time associated for each of the plurality of associated parts retrieved from the at least one piece of automated equipment;
a PM task database for storing a plurality of PM defined tasks; and
a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule based on the attrition time associated for each of the plurality of associated parts and the plurality of PM defined tasks for performing PM on the plurality of associated parts.
1 Assignment
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Accused Products
Abstract
The invention provides an enhanced system and method for dynamically generating an accurate preventative maintenance (“PM”) schedule for use in an automated facility. The system has a at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts; a tool performance tracking system (“TP2”) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment; a PM task database for storing a plurality of PM defined tasks; and a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts.
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Citations
25 Claims
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1. An enhanced system for use in generating a PM (preventative maintenance) schedule for an automated equipment facility comprising:
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at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor, to analyze attrition rate data, and to determine an attrition time associated for each of the plurality of associated parts retrieved from the at least one piece of automated equipment;
a PM task database for storing a plurality of PM defined tasks; and
a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule based on the attrition time associated for each of the plurality of associated parts and the plurality of PM defined tasks for performing PM on the plurality of associated parts. - View Dependent Claims (2, 3)
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4. A PM method for generating a PM schedule for an automated equipment facility comprising the steps of:
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providing at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor, to analyze attrition rate data, and to determine an attrition time associated for each of the plurality of associated parts retrieved from the at least one piece of automated equipment;
providing a PM task database for storing a plurality of PM defined tasks; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule based on the attrition time associated for each of the plurality of associated parts and the plurality of PM defined tasks for performing PM on the plurality of associated parts. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12)
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13. A PM method for generating a PM schedule for an automated wafer fabrication facility comprising the steps of:
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providing a plurality of wafer fabrication equipment, wherein each of the plurality of wafer fabrication equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the plurality of wafer fabrication equipment to monitor, to analyze data attrition rate data retrieved from the plurality of wafer fabrication equipment;
using the attrition rate date to determine an attrition time associated for each of the plurality of associated parts; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule based on the attrition time associated for each of the plurality of associated parts and the plurality of PM defined tasks for performing PM on the plurality of associated parts. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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21. A PM method for generating a PM schedule for an automated equipment facility comprising the steps of:
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providing at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment;
providing a PM task database for storing a plurality of PM defined tasks; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts;
using a parts measurement rule for recording and analyzing every defined state time for each of the plurality of associated parts disposed within the at least one piece of automated equipment, wherein the defined state time is the measured usage for each of the plurality of parts associated with each process performed within the associated at least one piece of automated equipment;
storing each defined state time in a parts measurement rule database;
communicating the plurality of defined state times from the parts measurement rule database to the TP2;
calculating a real-time value associated with each of the plurality of associated parts indicating actual usage of each of the plurality of associated parts;
using the real-time value associated with each of the plurality of associated parts to calculate an average parts attrition rate, wherein the average parts attrition rate is an average utilization time of parts in a period of time; and
using the average parts attrition rate associated with each of the plurality of associated parts to determine an attrition time associated for each of the plurality of associated parts, wherein the attrition time is a part'"'"'s lifespan.
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22. A PM method for generating a PM schedule for an automated equipment facility comprising the steps of:
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providing at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment;
providing a PM task database for storing a plurality of PM defined tasks; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts;
using a parts measurement rule for recording and analyzing every defined state time for each of the plurality of associated parts disposed within the at least one piece of automated equipment, wherein the defined state time is the measured usage for each of the plurality of parts associated with each process performed within the associated at least one piece of automated equipment;
storing each defined state time in a parts measurement rule database;
communicating the plurality of defined state times from the parts measurement rule database to the TP2;
calculating a real-time value associated with each of the plurality of associated parts indicating actual usage of each of the plurality of associated parts;
using the real-time value associated with each of the plurality of associated parts to calculate an average parts attrition rate, wherein the average parts attrition rate is an average utilization time of parts in a period of time;
using the average parts attrition rate associated with each of the plurality of associated parts to determine an attrition time associated for each of the plurality of associated parts, wherein the attrition time is a part'"'"'s lifespan;
communicating the attrition time associated with each of the plurality of associated parts from the TP2 to the PM system;
communicating the plurality of PM defined tasks to the PM system, wherein the plurality of PM defined tasks are performed in accordance with predefined PM criteria associated with each of the plurality of associated parts; and
using the attrition time associated for each of the plurality of associated parts and PM defined tasks communicated to the PM system to generate the PM schedule, wherein the PM schedule changes dynamically in accordance with each variance associated with each attrition time and each of the plurality of PM defined tasks.
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23. A PM method for generating a PM schedule for an automated wafer fabrication facility comprising the steps of:
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providing a plurality of wafer fabrication equipment, wherein each of the plurality of wafer fabrication equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the plurality of wafer fabrication equipment to monitor and to analyze data retrieved from the plurality of wafer fabrication equipment;
providing a PM task database for storing a plurality of PM defined tasks; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts;
using a parts measurement rule for recording and analyzing every defined state time for each of the plurality of associated parts disposed within the plurality of wafer fabrication equipment, wherein the defined state time is the measured usage for each of the plurality of parts associated with each process performed within the associated plurality of wafer fabrication equipment;
storing each defined state time in a parts measurement rule database;
communicating the plurality of defined state times from the parts measurement rule database to the TP2;
calculating a real-time value associated with each of the plurality of associated parts indicating actual usage of each of the plurality of associated parts;
using the real-time value associated with each of the plurality of associated parts to calculate an average parts attrition rate, wherein the average parts attrition rate is an average utilization time of parts in a period of time; and
using the average parts attrition rate associated with each of the plurality of associated parts to determine an attrition time associated for each of the plurality of associated parts, wherein the attrition time is a part'"'"'s lifespan.
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24. A PM method for generating a PM schedule for an automated wafer fabrication facility comprising the steps of:
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providing a plurality of wafer fabrication equipment, wherein each of the plurality of wafer fabrication equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the plurality of wafer fabrication equipment to monitor and to analyze data retrieved from the plurality of wafer fabrication equipment;
providing a PM task database for storing a plurality of PM defined tasks;
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts;
using a parts measurement rule for recording and analyzing every defined state time for each of the plurality of associated parts disposed within the plurality of wafer fabrication equipment, wherein the defined state time is the measured usage for each of the plurality of parts associated with each process performed within the associated plurality of wafer fabrication equipment;
storing each defined state time in a parts measurement rule database;
communicating the plurality of defined state times from the parts measurement rule database to the TP2;
calculating a real-time value associated with each of the plurality of associated parts indicating actual usage of each of the plurality of associated parts;
using the real-time value associated with each of the plurality of associated parts to calculate an average parts attrition rate, wherein the average parts attrition rate is an average utilization time of parts in a period of time;
using the average parts attrition rate associated with each of the plurality of associated parts to determine an attrition time associated for each of the plurality of associated parts, wherein the attrition time is a part'"'"'s lifespan;
communicating the attrition time associated with each of the plurality of associated parts from the TP2 to the PM system;
communicating the plurality of PM defined tasks to the PM system, wherein the plurality of PM defined tasks are performed in accordance with predefined PM criteria associated with each of the plurality of associated parts;
using the attrition time associated for each of the plurality of associated parts and PM defined tasks communicated to the PM system to generate the PM schedule, wherein the PM schedule changes dynamically in accordance with each variance associated with each attrition time and each of the plurality of PM defined tasks; and
executing a PM task in accordance with the dynamically generated PM schedule.
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25. A Preventative Maintenance (PM) method for generating a PM schedule for an automated equipment facility comprising the steps of:
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providing at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts; and
using both an attrition time associated for each of the plurality of associated parts and a plurality of PM defined tasks to generate a PM schedule, wherein the PM schedule changes dynamically in accordance with each variance associated with each attrition time and each of the plurality of PM defined tasks.
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Specification