Tuning fork gyroscope

• US 6,862,934 B2
• Filed: 10/04/2002
• Issued: 03/08/2005
• Est. Priority Date: 10/05/2001
• Status: Active Grant

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Borenstein, Jeffrey T., Sawyer, William D., Weinberg, Marc S., Duwel, Amy E., Kourepenis, Anthony S., Lento, Christopher M., Cousens, James R., Connelly, James H.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US10/264,887
• Publication Number:
  US 20030066351A1
• Time in Patent Office: 886 Days
• Field of Search: 735/041.2, 735/040.2, 735/040.4, 735/041.5, 735/041.6, 735/140.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 2924/19041 being a capacitor
• CPC Class Codes: H01L 2924/30105 Capacitance
• CPC Class Codes: H01L 2924/3025 Electromagnetic shielding

Abstract

A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for sensing changes in the nominal gaps between the sense plate and the proof mass and for outputting a signal indicative of the gyroscope angular rate.

Claims

1. A tuning fork gyroscope comprising:

a first substrate;

a plurality of proof masses including at least first and second proof masses suspended with respect to the first substrate;

means for oscillating the proof masses along a drive axis in the direction of the plane of the first substrate;

at least first and second sense plates supported by the first substrate, the first sense plate disposed under the first proof mass defining a first nominal gap between the first proof mass and the first sense plate, the second sense plate disposed under the second proof mass defining a second nominal gap between the second proof mass and the second sense plate;

a second substrate spaced from the first substrate;

at least third and fourth sense plates supported by the second substrate, the third sense plate disposed over the first proof mass defining a third nominal gap between the first proof mass and the third sense plate, the fourth sense plate disposed over the second proof mass defining a fourth nominal gap between the second proof mass and the fourth sense plate; and

means for sensing changes in the first, second, third and fourth nominal gaps between each sense plate and each proof mass and for outputting a signal indicative of the gyroscope angular rate about an axis parallel to the substrates.

2. The tuning fork gyroscope of claim 1 in which the means for sensing includes a first voltage, V_b, with +V_b applied to the first sense plate and −

V_b applied to the second sense plate, and a second voltage, V_t, different from but approximately equal to the first voltage V_b, with −

V_t applied to the third sense plate and +V_t applied to the fourth sense plate.

3. The tuning fork gyroscope of claim 2 in which the first and second nominal gaps are equal to g_b and the third and fourth nominal gaps are equal to g_t.

4. The tuning fork gyroscope of claim 3 in which the ratio of the second V_t and first V_b voltages is a function of the ratio of the nominal gap g_t and the nominal gap g_b.

5. The tuning fork gyroscope of claim 4 in which:

$\frac{V_t}{V_b}=\frac{g_t^3}{g_b^3}.$

6. The tuning fork gyroscope of claim 1 in which the means for sensing includes a first voltage, V_bl, applied to the first sense plate, a second voltage, V_br, applied to the second sense plate, a third voltage, V_tl, applied to the third sense plate, and a fourth voltage, V_tr, applied to the fourth sense plate.

7. The tuning fork gyroscope of claim 6 in which the first nominal gap is g_bl, the second nominal gap is g_br, the third nominal gap is g_tl and the fourth nominal gap is g_tr.

8. The tuning fork gyroscope of claim 6 in which the ratio of the first and third voltages is a function of the ratio of the first and third nominal gaps and the ratio of the second and third voltages is the function of the ratio of the second and fourth nominal gaps.

9. The tuning fork gyroscope of claim 8 in which:

$\frac{V_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>l}}{V_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>l}}=\frac{g_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>l}^3}{g_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>l}^3}<br><br>\text{\hspace{1em}<br><br>}<br><br>a<br><br>\text{\hspace{1em}<br><br>}<br><br>n<br><br>\text{\hspace{1em}<br><br>}<br><br>d<br><br>\text{\hspace{1em}<br><br>}<br><br>\frac{V_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>r}}{V_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>r}}=\frac{g_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>r}^3}{g_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>r}^3}.$

10. The tuning fork gyroscope of claim 9 in which the voltages V_tr and V_bl are of opposite sign than the voltages V_{tl and Vbr}.

11. The tuning fork gyroscope of claim 10 in which the voltages V_tr and V_bl are positive voltages and the voltages V_tl and V_br are negative voltages.

12. The tuning fork gyroscope of claim 1 wherein the means for oscillating the proof masses includes motor combs.

13. The tuning fork gyroscope of claim 12 wherein the motor combs are vertically split.

14. The tuning fork gyroscope of claim 12 wherein the motor combs are horizontally split.

15. The tuning fork gyroscope of claim 12 further including guard bands for controlling out-of-plane sensitivities.

16. The tuning fork gyroscope of claim 1 wherein the sense plates are made of metal.

17. The tuning fork gyroscope of claim 1 wherein the sense plates are made of deposited silicon.

18. The tuning fork gyroscope of claim 1 including a torsion beam connecting an anchor to a base beam.

19. The tuning fork gyroscope of claim 18 wherein the torsion beam is a folded beam.

20. The tuning fork gyroscope of claim 18 wherein the torsion beam is a strain relief chevron beam.

21. The tuning fork gyroscope of claim 18 wherein the torsion beam is a crab leg.

22. The tuning fork gyroscope of claim 1 further including at least one torque plate.

23. The tuning fork gyroscope of claim 6 in which the ratio of the first and third voltages is a function of the ratio of the first and third nominal gaps and the ratio of the second and fourth voltages is the function of the second and fourth nominal gaps.

24. The tuning fork gyroscope of claim 1 in which the means for sensing includes applying a voltage to the proof masses and reading voltages that appear on the sense plates.

25. The tuning fork gyroscope of claim 1 in which the means for sensing includes applying a voltage to the proof masses and reading a weighted summation of output currents on each of the sense plates for eliminating gyroscope sensitivity to vertical displacement.

26. The tuning fork gyroscope of claim 25 in which I_bl is the output current that appears on the first sense plate, I_br is the output current that appears on the second sense plate, I_tl is the output current that appears on the third sense plate, and I_tr is the output current that appears on the fourth sense plate.

27. The tuning fork gyroscope of claim 26 in which the first nominal gap is g_bl, the second nominal gap is g_br, the third nominal gap is g_tl, the fourth nominal gap is g_tr.

28. The tuning fork gyroscope of claim 27 in which the weighted summation of output currents on each of the sense plates is I_sum.

29. The tuning fork gyroscope of claim 28 where $I_s$

 

⁢

u⁢

 

⁢

m=It⁢

 

⁢

r-(It⁢

 

⁢

l⁢

(gt⁢

 

⁢

lgt⁢

 

⁢

r))3+(Ib⁢

 

⁢

l⁢

(gb⁢

 

⁢

lgt⁢

 

⁢

r))3-(Ib⁢

 

⁢

r⁢

(gb⁢

 

⁢

rgt⁢

 

⁢

r))3.

30. The tuning fork gyroscope of claim 29 where I_sum is proportional to input angular rate.

31. A method for reducing errors in a tuning fork gyroscope comprising:

determining a first distance, g_t, between an upper sense plate and a proof mass and a second distance, g_b, between a lower sense plate and the proof mass; and

applying a first voltage, V_t, to the upper sense plate and a second voltage, V_b, to the lower sense plate, wherein the ratio of the first voltage and the second voltage, is a function of the first distance and the second distance.

32. The method for reducing errors of claim 31, wherein V_t/V_b=g_t³/g_b³.

33. The method for reducing errors of claim 31, wherein said first and second voltages are DC voltages.

34. The method for reducing errors of claim 31, wherein said first and second voltages are AC carrier excitation voltages.

35. The method for reducing errors of claim 31, wherein said step of determining said first distance is carried out by measuring the capacitance between the upper sense plate and the proof mass.

36. The method for reducing errors of claim 31, wherein said step of determining said second distance is carried out by measuring the capacitance between the lower sense plate and the proof mass.

37. A method for reducing errors in a tuning fork gyroscope including first and second proof masses, a left upper sense plate disposed over the first proof mass, a right upper sense plate disposed over the second proof mass, a left lower sense plate disposed under the first proof mass and a right lower sense plate disposed under the second proof mass, the method comprising:

measuring a first distance, g_tl, between the left upper sense plate and the first proof mass, measuring a second distance, g_tr, between the right upper sense plate and the second proof mass, measuring a third distance, g_bl, between the left lower sense plate and the first proof mass, and measuring a fourth distance, g_br, between the right lower sense plate and the second proof mass; and

applying a first voltage, V_tl, to the left upper sense plate, a second voltage, V_tr, to the right upper sense plate, a third voltage, V_bl, to the left lower sense plate, and a fourth voltage, V_br, to the lower right sense plate,

wherein the ratio of V_tl and V_bl is a function of g_tl and g_bl and the ratio of V_tr and V_br is a function of g_tr and g_br.

38. The method of claim 37 wherein V_tl is not equal to V_tr and V_bl is not equal to V_br, and wherein $\frac{V_t}{}$

 

⁢

lVb⁢

 

⁢

l=gt⁢

 

⁢

l3gb⁢

 

⁢

l3⁢

 

⁢

a⁢

 

⁢

n⁢

 

⁢

d⁢

 

⁢

Vt⁢

 

⁢

rVb⁢

 

⁢

r=gt⁢

 

⁢

r3gb⁢

 

⁢

r3.

39. The method of claim 38 in which the voltages V_tr and V_bl are of opposite sign than the voltages V_tl and V_br.

40. A tuning fork gyroscope comprising:

a first substrate;

at least a first proof mass suspended with respect to the first substrate;

means for oscillating the first proof mass along a drive axis in the direction of the plane of the first substrate;

at least a first sense plate supported by the first substrate, the first sense plate disposed under the first proof mass defining a first nominal gap between the first proof mass and the first sense plate,

a second substrate spaced from the first substrate;

at least a second sense plate supported by the second substrate, the second sense plate disposed over the first proof mass defining a second nominal gap between the first proof mass and the second sense plate; and

means for sensing changes in the first and second nominal gaps between each sense plate and the first proof mass and for outputting a signal indicative of angular displacement of the gyroscope.

41. The tuning fork gyroscope of claim 40 in which the means for sensing includes a first voltage, V_b, applied to the first sense plate and a second voltage, V_t, different from the first voltage, applied to the second sense plate.

42. The tuning fork gyroscope of claim 40 in which the first nominal gap is equal to g_b and the second nominal gap is equal to g_t.

43. The tuning fork gyroscope of claim 40 in which the ratio of the second voltage V_t and first voltage V_b is a function of the ratio of the second nominal gap g_t and the first nominal gap g_b.

44. The tuning fork gyroscope of claim 40 in which $\frac{V_t}{V_b}=\frac{g_t^3}{g_b^3}.$

45. A tuning fork gyroscope comprising:

a first substrate;

a plurality of proof masses including at least first and second proof masses suspended with respect to the first substrate;

means for oscillating the proof masses along a drive axis in the direction of the plane of the first substrate;

at least first and second sense plates supported by the first substrate, the first sense plate disposed adjacent the first proof mass defining a first nominal gap between the first proof mass and the first sense plate, the second sense plate disposed adjacent the second proof mass defining a second nominal gap between the second proof mass and the second sense plate;

a second substrate spaced from the first substrate;

at least third and fourth sense plates supported by the second substrate, the third sense plate disposed adjacent the first proof mass but opposite the first sense plate, defining a third nominal gap between the first proof mass and the third sense plate, the fourth sense plate disposed adjacent the second proof mass but opposite the second sense plate, defining a fourth nominal gap between the second proof mass and the fourth sense plate; and

means for sensing changes in the first, second, third and fourth nominal gaps between each sense plate and each proof mass and for outputting a signal indicative of the gyroscope angular rate about an axis perpendicular to the substrates.

46. The tuning fork gyroscope of claim 45 in which the means for sensing includes a first voltage, V_b, with +V_b applied to the first sense plate and −

V_b applied to the second sense plate, and a second voltage, V_t, different from but approximately equal to the first voltage V_g, with −

V_t applied to the third sense plate and +V_t applied to the fourth sense plate.

47. The tuning fork gyroscope of claim 46 in which the first and second nominal gaps are equal to g_b and the third and fourth nominal gaps are equal to g_t.

48. The tuning fork gyroscope of claim 47 in which the ratio of the second voltage V_t and the first voltage V_b is a function of the ratio of the nominal gap g_t and the nominal gap g_b.

49. The tuning fork gyroscope of claim 48 in which:

$\frac{V_t}{V_b}=\frac{g_t^3}{g_b^3}.$

50. The tuning fork gyroscope of claim 45 in which the means for sensing includes a first voltage, V_bl, applied to the first sense plate, a second voltage, V_br, applied to the second sense plate, a third voltage, V_tl, applied to the third sense plate, and a fourth voltage, V_tr, applied to the fourth sense plate.

51. The tuning fork gyroscope of claim 50 in which the first nominal gap is g_bl, the second nominal gap is g_br, the third nominal gap is g_tl and the fourth nominal gap is g_tr.

52. The tuning fork gyroscope of claim 50 in which the ratio of the first and third voltages is a function of the ratio of the first and third nominal gaps and the ratio of the second and third voltages is a function of the ratio of the second and fourth nominal gaps.

53. The tuning fork gyroscope of claim 52 in which:

$\frac{V_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>l}}{V_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>l}}=\frac{g_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>l}^3}{g_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>l}^3}<br><br>\text{\hspace{1em}<br><br>}<br><br>a<br><br>\text{\hspace{1em}<br><br>}<br><br>n<br><br>\text{\hspace{1em}<br><br>}<br><br>d<br><br>\text{\hspace{1em}<br><br>}<br><br>\frac{V_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>r}}{V_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>r}}=\frac{g_{t<br><br>\text{\hspace{1em}<br><br>}<br><br>r}^3}{g_{b<br><br>\text{\hspace{1em}<br><br>}<br><br>r}^3}.$

54. The tuning fork gyroscope of claim 53 in which the voltages V_tr and V_bl are of opposite sign than the voltages V_tl and V_br.

55. The tuning fork gyroscope of claim 54 in which the voltages V_tr and V_bl are positive voltages and the voltages V_tl and V_br are negative voltages.

56. The tuning fork gyroscope of claim 45 including additional sense plates arranged in a comb-like configuration.