Segmented electrode apparatus for plasma processing
First Claim
1. An electrode assembly for providing a controlled RF electric field profile within a region capable of supporting a plasma, comprising:
- a) an upper electrode having a lower surface, an upper surface and an outer edge, wherein the region capable of supporting a plasma is adjacent said upper electrode lower surface; and
b) a segmented electrode arranged proximate to said upper electrode upper surface, comprising two or more separated electrode segments each having an upper and lower surface, at least lower surfaces of said two or more separated electrode segments being spaced apart from said upper electrode upper surface by corresponding controlled gaps, said segmented electrode and said upper electrode being sealed so that said segmented electrode is isolated from said plasma by said upper electrode.
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Accused Products
Abstract
An electrode assembly (50) and an associated plasma reactor system (10) and related methods for a variety of plasma processing applications. The electrode assembly provides control of a plasma density profile (202) within an interior region (30) of a plasma reactor chamber (20). The electrode assembly includes an upper electrode (54) having a lower surface (54L), an upper surface (54U) and an outer edge (54E). The lower surface of the upper electrode faces interior region of the plasma chamber housing the plasma (200), and thus interfaces with the plasma. The electrode assembly further includes a segmented electrode (60) arranged proximate to and preferably substantially parallel with the upper surface of the upper electrode. The segmented electrode comprises two or more separated electrode segments (62a, 62b, . . . 62n), each having an upper and lower surface. Each electrode segment is spaced apart from the upper electrode upper surface by a corresponding controlled gap (Ga, Gb, . . . Gn). The electrode assembly may further include one or more actuators (110) attached to one or more electrode segments at the upper surface of the one or more electrode segments. The actuators allow for movement of the one or more electrode segments to adjust one or more of the controlled gaps. The adjustable controlled gaps allow for controlling the shape of the plasma density profile within the interior region of the chamber, thereby allowing for a desired plasma process result.
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Citations
47 Claims
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1. An electrode assembly for providing a controlled RF electric field profile within a region capable of supporting a plasma, comprising:
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a) an upper electrode having a lower surface, an upper surface and an outer edge, wherein the region capable of supporting a plasma is adjacent said upper electrode lower surface; and
b) a segmented electrode arranged proximate to said upper electrode upper surface, comprising two or more separated electrode segments each having an upper and lower surface, at least lower surfaces of said two or more separated electrode segments being spaced apart from said upper electrode upper surface by corresponding controlled gaps, said segmented electrode and said upper electrode being sealed so that said segmented electrode is isolated from said plasma by said upper electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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17. An electrode assembly for providing a controlled RF electric field profile within a region capable of supporting a plasma, comprising:
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a) an upper electrode having a lower surface, an upper surface and an outer edge, wherein the region capable of supporting a plasma is adjacent said upper electrode lower surface;
b) a segmented electrode arranged proximate to said upper electrode upper surface, comprising two or more separated electrode segments each having an upper and lower surface, said two or more separated electrode segments being spaced apart from said upper electrode upper surface by corresponding controlled gaps; and
c) a modular housing enclosing said two or more separated electrode segments and said outer edge, said modular housing having dielectric side walls, and an upper wall, which in combination with said upper surface of said upper electrode define an electrode cavity containing a dielectric cooling fluid which is circulated around said electrode segments, over said upper surface of said upper electrode, and through said controlled gaps.
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47. An electrode assembly for providing a controlled RF electric field profile within a region capable of supporting a plasma, comprising:
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a) an upper electrode having a lower surface, an upper surface and an outer edge, wherein the region capable of supporting a plasma is adjacent said upper electrode lower surface; and
b) a segmented electrode arranged proximate to said upper electrode upper surface, comprising two or more separated electrode segments each having an upper and lower surface, at least lower surfaces of said two or more separated electrode segments being spaced apart from said upper electrode upper surface by corresponding controlled gaps, and further including first corrugations and first spaces on said lower surfaces of said electrode segments, and second corrugations and second spaces on said upper surface of said upper electrode, wherein said first corrugations are aligned with said second spaces.
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Specification