Micro-mirror device for an image display apparatus and method of using the same
First Claim
Patent Images
1. A micro-mirror device for an image display apparatus, comprising:
- a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror, wherein the girder includes;
a support plate for supporting the second post, the support plate having connecting portions which protrude from sides of the support plate in a direction parallel to a lengthwise direction of the pair of base electrodes and are point-symmetrical to each other on the basis of the second post; and
a pair of springs which connect an upper surface of each of the pair of first posts to each of the connecting portions, wherein the pair of springs are elastically deformed when the mirror is vertically inclined by the electrostatic attraction between the mirror and the base electrodes.
1 Assignment
0 Petitions
Accused Products
Abstract
A micro-mirror device for an image display apparatus which can change the travel path of incident light by pivoting a mirror, which corresponds to a pixel and can increase optical efficiency by pivoting the mirror in the direction of the sides of the mirror. The micro-mirror device for an image display apparatus includes a substrate, a landing pad provided on the substrate, and a pair of base electrodes provided on opposite sides of the landing pad. A pair of first posts protrude from the upper surface of the landing pad, and are isolated from each other by a predetermined interval. A girder, supported by the pair of first posts, pivots toward the sides of the base electrodes due to an electrostatic attraction. A second post protrudes from the upper surface of the girder. A mirror, which is supported by the second post, reflects incident light, and receives power via the landing pad. Thus, the mirror is pivoted toward the sides of the landing pad by the electrostatic attraction between the base electrodes and the mirror.
-
Citations
17 Claims
-
1. A micro-mirror device for an image display apparatus, comprising:
-
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror, wherein the girder includes;
a support plate for supporting the second post, the support plate having connecting portions which protrude from sides of the support plate in a direction parallel to a lengthwise direction of the pair of base electrodes and are point-symmetrical to each other on the basis of the second post; and
a pair of springs which connect an upper surface of each of the pair of first posts to each of the connecting portions, wherein the pair of springs are elastically deformed when the mirror is vertically inclined by the electrostatic attraction between the mirror and the base electrodes. - View Dependent Claims (2, 3, 4, 7, 8, 13)
-
-
5. A micro-mirror device for an image display apparatus comprising:
-
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror, wherein the pair of first posts have a height that is lower than a height of the second post, so that the mirror does not make an adhesive contact with the pair of base electrodes, and wherein the girder includes;
a support plate for supporting the second post, the support plate having connecting portions which protrude from sides of the support plate in a direction parallel to a lengthwise direction of the pair of base electrodes and are point-symmetrical to each other on the basis of the second post; and
a pair of springs which connect an upper surface of each of the pair of first posts to each of the connecting portions, wherein the pair of springs are elastically deformed in opposite directions when the mirror is vertically inclined by the electrostatic attraction between the mirror and the pair of base electrodes. - View Dependent Claims (6)
-
-
9. An image display device, comprising:
-
a plurality of micro-mirror devices, wherein each of the plurality of micro-mirror devices comprises;
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, an receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirrors, wherein said girder includes a pair of spring members, and said mirror has an axis of rotation which is perpendicular to a lengthwise direction of said pair of spring members, wherein the pair of spring members respectively connect the girder to the pair of first posts. - View Dependent Claims (10, 11, 14)
-
-
12. A method of reflecting light using a micro-mirror device in an image display apparatus, comprising:
-
supplying a driving voltage to at least one of a pair of base electrodes of the micro-mirror device, the base electrodes having a landing pad disposed therebetween;
creating an electrostatic attraction between the at least one of the pair of the base electrodes and a mirror, wherein the mirror is pivotally supported by a pair of spring members so as to be pivoted around an axis formed in a lengthwise direction of the pair of base electrodes such that one of the spring members is forced in a direction opposite a direction of the other of the spring members when the mirror is pivoted, the spring members being connected to a support plate; and
altering the driving voltage which is supplied to the at least one of the pair of base electrodes so that a reflection angle of light incident upon the mirror is controlled and so that landing tips, which protrude from the support plate, contact the landing pad when the mirror is pivoted.
-
-
15. A micro-mirror device for an image display apparatus comprising:
-
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror, wherein said girder includes a pair of spring members, each spring member respectively having an end in connection with one of said first posts, and wherein said spring members are disposed so that one of said spring members is forced in a direction opposite direction of the other of said spring members when said mirror is pivoted, and wherein the girder includes landing tips which protrude from sides of the girder and contact the landing pad when the mirror is pivoted.
-
-
16. A micro-mirror device for an image display apparatus, comprising:
-
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror, wherein said girder includes a pair of spring members, and said mirror has an axis of rotation which is perpendicular to a lengthwise direction of said pair of spring members, wherein the pair of spring members respectively connect the girder to the pair of first posts.
-
-
17. An image display device, comprising:
-
a plurality of micro-mirror devices, wherein each of the plurality of micro-mirror devices comprises;
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad, wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror, wherein said girder includes a pair of spring members, each spring member respectively having an end in connection with one of said first posts, and wherein said spring members are disposed so that one of said spring members is forced in a direction opposite a direction of the other of said spring members when said mirror is pivoted, and wherein the girder includes landing tips which protrude from sides of the girder and contact the landing pad when the mirror is pivoted.
-
Specification
-
- Resources
Litigation Campaign Assessment
Thank you for your request. You will receive a custom alert email when the Litigation Campaign Assessment is available.
×
-
Current AssigneeSamsung Electronics Co. Ltd.
-
Original AssigneeSamsung Electronics Co. Ltd.
-
InventorsKweon, Soon-cheol, Shin, Hyung-jae, Shin, Jong-woo
-
Primary Examiner(s)Shankar, Vijay
-
Assistant Examiner(s)Shapiro, Leonid
-
Application NumberUS09/725,959Publication NumberTime in Patent Office1,559 DaysField of Search345/55, 345/84, 345/85, 345/108, 345/204, 359/838, 359/237, 359/224US Class Current345/108CPC Class CodesG02B 26/0841 the reflecting element bein...
