Projection exposure methods and apparatus, and projection optical systems
First Claim
Patent Images
1. A projection optical system for forming a reduced image of a pattern on a first surface, onto a second surface, comprising, in order from the first surface side:
- a first lens unit having a negative refracting power;
a second lens unit having a positive refracting power;
a third lens unit having a negative refracting power;
a fourth lens unit having a positive refracting power;
an aperture stop; and
a fifth lens unit having a positive refracting power;
wherein the following conditions are satisfied;
−
1.3<
1/β
1<
0, and
0.08<
L1/L<
0.17, where β
1 is a composite, lateral magnification of said first lens unit and said second lens unit, L1 is a distance from said first surface to a lens surface closest to said second surface in said second lens unit, and L is a distance from said first surface to said second surface.
0 Assignments
0 Petitions
Accused Products
Abstract
Provided is a dioptric projection optical system favorably applicable to projection exposure apparatus used in the lithography step in fabrication of microdevices such as semiconductor devices. This projection optical system includes a positive, front lens unit (GF), an aperture stop (AS), and a positive, rear lens unit (GR) and is a bitelecentric optical system. The optical system satisfies the following condition:
0.065<f2/L<0.125,
- where f2 is a focal length of the rear lens unit (GR) and L is a distance between an object and an image.
The projection optical system includes at least one aspheric surface (ASP 1 to ASP 6).
-
Citations
15 Claims
-
1. A projection optical system for forming a reduced image of a pattern on a first surface, onto a second surface, comprising, in order from the first surface side:
-
a first lens unit having a negative refracting power;
a second lens unit having a positive refracting power;
a third lens unit having a negative refracting power;
a fourth lens unit having a positive refracting power;
an aperture stop; and
a fifth lens unit having a positive refracting power;
wherein the following conditions are satisfied;
−
1.3<
1/β
1<
0, and
0.08<
L1/L<
0.17,where β
1 is a composite, lateral magnification of said first lens unit and said second lens unit, L1 is a distance from said first surface to a lens surface closest to said second surface in said second lens unit, and L is a distance from said first surface to said second surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A method of fabricating a projection optical system for forming a reduced image of a pattern on a first surface, onto a second surface, comprising the steps of:
-
a step of preparing a first lens unit having a negative refracting power;
a step of preparing a second lens unit having a positive refracting power;
a step of preparing a third lens unit having a negative refracting power;
a step of preparing a fourth lens unit having a positive refracting power;
a step of preparing an aperture stop;
a step of preparing a fifth lens unit having a positive refracting power; and
a step of locating said first lens unit, said second lens unit, said third lens unit, said fourth lens unit, said aperture stop, and said fifth lens unit in the order named from the said first surface side;
wherein, where β
1 is a composite, lateral magnification of said first lens unit and said second lens unit, L1 a distance from said first surface to a lens surface closest to said second surface in said second lens unit, and L a distance from said first surface to said second surface, said first and second lens units are prepared so as to satisfy the following condition;
−
1.3<
1/β
1<
0,and said first and second lens units are located so as to satisfy the following condition;
0.08<
L1/L<
0.17.
-
-
13. A dioptric projection optical system for forming an image of a first surface onto a second surface, comprising:
-
a first lens group with a negative refractive power, arranged in an optical path between the first surface and the second surface;
a second lens group with a positive refractive power, arranged in an optical path between the first lens group and the second surface;
a third lens group with a negative refractive power, arranged in an optical path between the second lens group and the second surface;
a fourth lens group with a positive refractive power, arranged in an optical path between the third lens group and the second surface;
an aperture stop arranged in an optical path between the fourth lens group and the second surface; and
a fifth lens group with a positive refractive power, arranged in an optical path between the aperture stop and the second surface, wherein lenses of the projection optical system have a clear aperture diameter respectively, wherein said clear aperture diameters have a first relatively large value in the second lens group, a minimum value in the third lens group, and a second relatively large value in the third, fourth, or fifth lens groups, and wherein the minimum value of the clear aperture diameters is the only waist in the optical path between the first surface and the second surface.
-
-
14. A method of imaging an image of a first surface onto a second surface, comprising the steps of:
-
guiding a radiation from the first surface to a first lens group with a negative refractive power;
guiding a radiation from the first lens group to a second lens group with a positive refractive power;
guiding a radiation from the second lens group to a third lens group with a negative refractive power;
guiding a radiation from the third lens group to a fourth lens group with a positive refractive power;
guiding a radiation from the fourth lens group to an aperture stop;
guiding a radiation from the aperture stop to a fifth lens group with a positive refractive power; and
imaging the image of the first surface onto the second surface based on a radiation from the fifth lens group, wherein a diameter of the radiation from the first surface toward the second surface has a first relatively large value in the second lens group, a minimum value in the third lens group, and a second relatively large value in the third, fourth, or fifth lens groups, and wherein the minimum value of the diameter is the only waist in the optical path between the first surface and the second surface.
-
-
15. A dioptric projection optical system for forming an image of a first surface onto a second surface, comprising:
-
a first lens group with a negative refractive power, arranged in an optical path between the first surface and the second surface;
a second lens group with a positive refractive power, arranged in an optical path between the first lens group and the second surface;
a third lens group with a negative refractive power, arranged in an optical path between the second lens group and the second surface;
a fourth lens group with a positive refractive power, arranged in an optical path between the third lens group and the second surface;
an aperture stop arranged in an optical path between the fourth lens group and the second surface; and
a fifth lens group with a positive refractive power, arranged in an optical path between the aperture stop and the second surface, wherein lenses of the projection optical system have an outer diameter respectively, wherein the outer diameters have a first relatively large value in the second lens group, a minimum value in the third lens group, and a second relatively large value in the third, fourth, or fifth lens groups, and wherein the minimum value of the outer diameters is the only waist in the optical path between the first surface and the second surface.
-
Specification