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Wavelength tunable VCSEL

  • US 6,865,214 B2
  • Filed: 05/30/2003
  • Issued: 03/08/2005
  • Est. Priority Date: 08/07/2002
  • Status: Expired due to Term
First Claim
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1. A wavelength tunable VCSEL comprising:

  • a substrate;

    a first electrode which is formed underneath the substrate;

    a lower distributed Bragg reflector which is formed on the substrate;

    a current constricting layer which is formed on the lower distributed Bragg reflector;

    a cavity resonator layer which is formed on the current constricting layer;

    an upper distributed Bragg reflector which is formed on a predetermined region of the cavity resonator layer;

    a second electrode which is formed on the cavity resonator layer around the upper distributed Bragg reflector and used along with the first electrode for laser oscillation; and

    third electrode which is formed on the upper distributed Bragg reflector and used along with the second electrode for changing a width of an effective resonance region.

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