Bistable latching actuator for optical switching applications
First Claim
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1. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a pair of rocker arms disposed end-to-end for movement into and out of a plane, a flexible coupling between confronting ends of the arms, a mirror mounted on one of the arms, means yieldably urging the arms toward each other with a force that causes the arms to rock to and remain in two stable latching positions with the confronting ends on opposite sides of the plane, and means for selectively moving the arms between the two stable latching positions.
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Abstract
Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.
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Citations
33 Claims
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1. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a pair of rocker arms disposed end-to-end for movement into and out of a plane, a flexible coupling between confronting ends of the arms, a mirror mounted on one of the arms, means yieldably urging the arms toward each other with a force that causes the arms to rock to and remain in two stable latching positions with the confronting ends on opposite sides of the plane, and means for selectively moving the arms between the two stable latching positions.
- View Dependent Claims (2, 3, 4, 5)
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6. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a pair of rocker arms disposed end-to-end, laterally extending cross arms affixed to the rocker arms, longitudinally extending mounting springs connected to the cross arms and supporting the rocker arms for movement relative to a plane, a coupling spring extending longitudinally between confronting ends of the rocker arms and constraining the confronting ends for movement in concert between opposite sides of the plane, a mirror carried by one of the rocker arms, means for compressing the springs to preload the springs and thereby bias the confronting ends of the rocker arms toward stable latching positions on opposite sides of the plane, and means for selectively switching the arms between the stable latching positions.
- View Dependent Claims (7, 8, 9, 10, 11)
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12. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a substrate, first and second rocker arms disposed end-to-end and generally parallel to a major surface of the substrate, a mirror carried by the first rocker arm for movement in a direction generally perpendicular to the surface of the substrate, cross arms extending laterally from the rocker arms and parallel to the surface of the substrate, a first set of mounting springs extending between the cross arms on the first rocker arm and anchors affixed to the substrate, a longitudinally extending stem supported by a pair of laterally extending flexures for movement between advanced and retracted positions, a cross beam affixed to the stem, a second set of mounting springs disposed between the cross beam and the cross arm on the second rocker arm, a spring which couples the confronting ends of the rocker arms together for movement in concert, a latch engagable with the stem for holding the stem in its advanced position with the springs compressed and biasing the confronting ends of the rocker arms toward stable latching positions on opposite sides of a plane parallel to the surface of the substrate, and an electrostatic comb drive having interleaved fingers affixed to the rocker arms and to the substrate for initiating movement of the rocker arms between the stable latching positions.
- 13. A bistable latching actuator for use in optical fiber switching applications, comprising a generally planar mechanism having an arm which carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm.
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17. A bistable latching actuator for use in optical fiber switching applications, comprising a generally planar mechanism having an arm which carries a mirror for movement between two stable positions on opposite sides of the plane of the mechanism, and an electrostatic comb drive for applying a force to the arm to initiate and damp movement between the stable positions.
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18. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a pair of longitudinally extending rocker arms disposed end-to-end, mounting springs supporting the rocker arms for rocking movement relative to a plane, a coupling spring interconnecting confronting ends of the rocker arms and constraining the confronting ends for movement in concert between opposite sides of the plane, a mirror carried by one of the rocker arms, and a preloader for exerting a preloading force upon the springs so that the springs bias the confronting ends of the rocker arms toward stable latching positions on opposite sides of the plane.
- View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a pair of longitudinally extending rocker arms disposed end-to-end, longitudinally compressible mounting springs supporting the rocker arms for rocking movement relative to a plane, a longitudinally compressible coupling spring interconnecting confronting ends of the rocker arms and constraining the confronting ends for movement in concert between opposite sides of the plane, a mirror carried by one of the rocker arms, a preloader movable between longitudinally advanced and retracted positions relative to the rocker arms for exerting a compressive force upon the springs in the advanced position, and a latch for holding the preloader in the advanced position.
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30. A bistable latching actuator for use in optical fiber switching applications, comprising:
- a substrate, first and second axially elongated rocker arms disposed end-to-end and generally parallel to a major surface of the substrate, a mirror carried by the first rocker arm, axially compressible mounting springs connected between the rocker arms and the substrate, means interconnecting the confronting ends of the rocker arms for movement in concert between stable latching positions on opposite sides of a plane parallel to the surface of the substrate, with the mirror moving in a direction generally perpendicular to the surface, and a preloader for exerting a compressive force on the springs to urge the rocker arms toward the latching positions.
- View Dependent Claims (31, 32, 33)
Specification