Method for predicting life of rotary machine and determining repair timing of rotary machine
First Claim
Patent Images
1. A method for predicting life of rotary machine comprising:
- reading a load recipe of loading conditions of a rotary machine;
determining whether changes exist for said loading conditions by comparing said load recipe with an already existing load recipe for the process;
employing an already existing determination reference if no changes exist for said loading conditions, and reading in and employing a determination reference accommodating said process conditions if changes exist for said loading conditions instead of said already existing determination reference;
processing time series data by reading in detected characterizing feature data for said rotary machine, which correspond to said determination reference; and
calculating life expectancy of said rotary machine in conformity with said time series data and said detennination reference.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for predicting life expectancy of a rotary machine includes: a load recipe input module acquiring loading conditions of a rotary machine; a characterizing feature input module obtaining characterizing feature data of a rotary machine; and a life expectancy prediction module calculating life expectancy of the rotary machine in conformity with the loading conditions and the characterizing feature datap.
24 Citations
18 Claims
-
1. A method for predicting life of rotary machine comprising:
-
reading a load recipe of loading conditions of a rotary machine;
determining whether changes exist for said loading conditions by comparing said load recipe with an already existing load recipe for the process;
employing an already existing determination reference if no changes exist for said loading conditions, and reading in and employing a determination reference accommodating said process conditions if changes exist for said loading conditions instead of said already existing determination reference;
processing time series data by reading in detected characterizing feature data for said rotary machine, which correspond to said determination reference; and
calculating life expectancy of said rotary machine in conformity with said time series data and said detennination reference. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method for determining timing of rotary machine repair comprising:
-
reading a load recipe of loading conditions of a rotary machine;
determining whether changes exist for said loading conditions by comparing said load recipe with an already existing load recipe for the process;
employing an already existing determination reference if no changes exist for said loading conditions, and reading in and employing a determination reference accommodating said process conditions if changes exist for said loading conditions instead of said already existing determination reference;
processing time series data by reading in detected characterizing feature data for said rotary machine, which correspond to said determination reference;
calculating life expectancy of said rotary machine in conformity with said time series data and said determination reference;
finding stand-by times of the process in a time period until said calculated life expectancy is reached, by a semiconductor production simulator; and
determining a stand-by time, of said found stand-by times, which least affects said process or a time including said stand-by time, to be the replacement or repair time of said rotary machine. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
-
Specification