Sharpness testing of micro-objects such as miniature diamond tool tips

• US 6,865,927 B1
• Filed: 02/18/2003
• Issued: 03/15/2005
• Est. Priority Date: 01/30/2001
• Status: Expired due to Term

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Rogers, David A.
• Application Number:
  US10/370,088
• Time in Patent Office: 756 Days
• Field of Search: 731/04, 731/05, 250/307, 250/309, 250/310, 250/311, 356/239.2, 356/601
• US Class Current: 73/105
• CPC Class Codes: G01B 11/02 for measuring length, width or thickness G01B11/08 takes precedence
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/49901 Sequentially associating parts on stationary aligning means
• CPC Class Codes: Y10T 29/53078 with means to fasten by frictional fitting
• CPC Class Codes: Y10T 29/53996 by deforming

Abstract

A micro-object having a desired sharp point or edge may be optically tested during fabrication. This is accomplished by applying a known force to the workpiece against an optically opaque layer disposed on a transparent substrate, passing light down the workpiece toward the opaque layer, and determining whether the shaped portion of the workpiece has sufficiently penetrated the opaque layer so that light passed through the workpiece can be detected on the remote side of the transparent substrate. If the light is not detected, the shaped portion of the workpiece is considered to be insufficiently sharp, and the workpiece can be subjected to further shaping operations. In another arrangement, after the force is applied to cause penetration of the opaque layer by the shaped portion of the workpiece, the substrate and the workpiece are moved laterally with respect to one another so as to form a scratch on the opaque layer. The workpiece can be removed from the vicinity of the opaque layer and the amount of light transmitted through the scratch can be measured. If the amount of light is sufficient, the shaped portion of the workpiece is considered to be sufficiently sharp.

Claims

1. A method of testing a workpiece of known hardness to determine the sharpness of an end of the workpiece, the method comprising:

providing a layer structure of known hardness characteristics and known thickness on a substrate;

applying the end of the workpiece against the layer structure with a known force;

directing electromagnetic radiation along the workpiece toward the end of the workpiece;

measuring an amount of electromagnetic radiation passing through the substrate as a result of the end of the workpiece penetrating the layer structure;

determining information about the sharpness of the end of the workpiece based on the amount of electromagnetic radiation so measured.

2. The method of claim 1, wherein the known force and known thickness are determined by:

using (a) a hypothetical workpiece having the hardness of the actual workpiece and having an end with a particular desired sharpness, and (b) a hypothetical material having the known hardness characteristics of the layer structure, to determine analytically a penetration depth of the hypothetical workpiece into the hypothetical material, the penetration depth being determined for a number of applied forces;

selecting a suitable force value and penetration depth value;

determining a thickness of the layer structure that is given by the suitable penetration depth plus the tunneling distance of the layer structure.

3. The method of claim 1, wherein the index of refraction of the substrate is at least as great as the index of refraction of the workpiece.

4. The method of claim 1, wherein the layer structure consists of a single layer of material.

5. The method of claim 1, wherein the layer structure is a composite layer structure comprising first and second materials, the first material being softer and more opaque than the second material.

6. A method of testing a workpiece of known hardness to determine the sharpness of an end of the workpiece, the method comprising:

providing an opaque layer structure of known hardness characteristics and known thickness on a transparent substrate;

applying the end of the workpiece against the opaque layer structure with a known force;

directing light along the workpiece toward the end of the workpiece;

measuring an amount of light passing through the transparent substrate as a result of the end of the workpiece penetrating the opaque layer structure;

determining information about the sharpness of the end of the workpiece based on the amount of light so measured.

7. The method of claim 6, wherein the known force and known thickness are determined by:

using (a) a hypothetical workpiece having the hardness of the actual workpiece and having an end with a particular desired sharpness, and (b) a hypothetical material having the known hardness characteristics of the layer structure, to determine analytically a penetration depth of the hypothetical workpiece into the hypothetical material, the penetration depth being determined for a number of applied forces;

selecting a suitable force value and penetration depth value;

determining a thickness that is given by the suitable penetration depth plus the tunneling distance of the opaque layer structure.

8. The method of claim 6, wherein the index of refraction of the substrate is at least as great as the index of refraction of the workpiece.

9. The method of claim 6, wherein the opaque layer structure consists of a single layer of material.

10. The method of claim 6, wherein the opaque layer structure is a composite layer structure comprising first and second materials, the first material being softer and more opaque than the second material.

11. A method of testing a workpiece of known hardness to determine the sharpness of an end of the workpiece, the method comprising:

providing a layer structure of known hardness characteristics and known thickness on a substrate;

applying the end of the workpiece against the layer structure with a known force;

effecting relative lateral movement between the workpiece and the substrate in order to form a scratch in the layer structure;

directing electromagnetic radiation toward the scratch on the layer structure;

measuring an amount of electromagnetic radiation passing through the substrate as a result of the end of the workpiece having scratched the layer structure;

determining information about the sharpness of the end of the workpiece based on the amount of electromagnetic radiation so measured.

12. The method of claim 11, wherein the layer structure consists of a single layer of material.

13. The method of claim 11, wherein the layer structure is a composite layer structure comprising first and second materials, the first material being softer and more opaque than the second material.

14. The method of claim 11, wherein directing electromagnetic radiation toward the scratch is performed after removing the end of the workpiece from the layer structure.

15. The method of claim 11, and further comprising:

prior to effecting relative lateral movement, directing electromagnetic radiation along the workpiece toward the end of the workpiece;

measuring an amount of electromagnetic radiation passing through the substrate as a result of the end of the workpiece penetrating the layer structure; and

only effecting the relative lateral movement after it has been determined that a sufficient amount of electromagnetic radiation passed through the substrate to signify penetration of the opaque layer structure.

16. The method of claim 11, wherein the known force and known thickness are determined by:

using (a) a hypothetical workpiece having the hardness of the actual workpiece and having an end with a particular desired sharpness, and (b) a hypothetical material having the known hardness characteristics of the layer structure, to determine analytically a penetration depth of the hypothetical workpiece into the hypothetical material, the penetration depth being determined for a number of applied forces;

selecting a suitable force value and penetration depth value;

determining a thickness that is given by the suitable penetration depth plus the tunneling distance of the layer structure.

17. The method of claim 11, wherein the index of refraction of the substrate is at least as great as the index of refraction of the workpiece.