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Aluminum oxide moisture sensor and related method

  • US 6,865,940 B2
  • Filed: 06/25/2003
  • Issued: 03/15/2005
  • Est. Priority Date: 06/25/2003
  • Status: Active Grant
First Claim
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1. A method of operating an aluminum oxide moisture sensor to measure moisture in a sample gas, where the sensor comprises a pair of electrodes sandwiched about a dielectric, the method comprising:

  • a) heating the sensor to a first temperature above the sample gas temperature and holding the sensor at said first temperature for a first predetermined period of time;

    b) cooling down the sensor to a second lower temperature over a second predetermined period of time;

    c) taking plural samples of sensor conductance over a third predetermined period of time at said lower temperature; and

    d) determining a rate of adsorption of the moisture and using the rate of adsorption as a measure of moisture in the sample gas.

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