Methods and systems for decelerating proof mass movements within MEMS structures
First Claim
1. A micro-electromechanical systems (MEMS) device comprising:
- a substrate comprising at least one anchor;
a proof mass comprising either or both of at least one deceleration extension extending from said proof mass and at least one deceleration indentation formed in said proof mass;
a motor drive comb;
a motor sense comb;
a plurality of suspensions configured to suspend said proof mass over said substrate and between said motor drive comb and said motor sense comb, said suspensions anchored to said substrate;
a body attached to said substrate; and
at least one deceleration beam extending from said body, said deceleration beams configured to engage either said at least one deceleration extension or said at least one deceleration indentation and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb.
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Accused Products
Abstract
A micro-electromechanical systems (MEMS) device is described which includes a substrate having at least one anchor, a proof mass having either of at least one deceleration extension extending from the proof mass or at least one deceleration indentation formed in the proof mass, a motor drive comb, and a motor sense comb. The MEMS device further includes a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb, and the suspensions are anchored to the substrate. The MEMS device also includes a body attached to the substrate and at least one deceleration beam extending from the body. The deceleration extensions are configured to engage either deceleration beams or deceleration indentations and slow or stop the proof mass before it contacts either of the motor drive comb or the motor sense comb.
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Citations
42 Claims
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1. A micro-electromechanical systems (MEMS) device comprising:
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a substrate comprising at least one anchor;
a proof mass comprising either or both of at least one deceleration extension extending from said proof mass and at least one deceleration indentation formed in said proof mass;
a motor drive comb;
a motor sense comb;
a plurality of suspensions configured to suspend said proof mass over said substrate and between said motor drive comb and said motor sense comb, said suspensions anchored to said substrate;
a body attached to said substrate; and
at least one deceleration beam extending from said body, said deceleration beams configured to engage either said at least one deceleration extension or said at least one deceleration indentation and slow or stop said proof mass before said proof mass contacts said motor drive comb and said motor sense comb. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A deceleration stop for a micro-electromechanical systems (MEMS) device, the MEMS device comprising a substrate and at least one proof mass, said deceleration stop comprising:
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a body;
either at least one deceleration extension extending from said proof mass or at least one deceleration indentation formed in said proof mass; and
a plurality of deceleration beams extending from said body, said deceleration beams extending toward said proof mass, said deceleration extensions and said deceleration indentations configured to engage at least one of said deceleration beams and cause grid proof mass to slow or stop before contacting components of the MEMS device adjacent to said proof mass. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. A gyroscope comprising:
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a substrate;
at least one crossbeam anchored to said substrate;
at least one proof mass, each said proof mass comprising either at least one deceleration extension or at least one deceleration indentation;
a plurality of suspensions connected to a respective one of said crossbeams and configured to suspend said proof masses above said substrate;
motor drive combs adjacent each said proof mass;
motor sense combs adjacent each said proof mass;
at least one body attached to each said crossbeam; and
a plurality of deceleration beams extending from said body, said deceleration extensions and said deceleration indentations configured to engage at least one of said deceleration beams and cause said proof masses to slow or stop before contacting said motor drive comb and said motor sense comb. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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30. A method for reducing impacts and a speed of impacts between proof masses and adjacent components in micro-electromechanical systems (MEMS) devices, said method comprising:
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configuring the proof masses with at least one deceleration extension which extends from the proof mass;
providing a plurality of deceleration beams which extend towards the proof mass from a body, the deceleration extensions configured to engage at least one of the deceleration beams and cause the proof mass to slow or stop before contacting any component of the MEMS device adjacent to the proof mass; and
providing an anchor for the body. - View Dependent Claims (31)
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32. A method for reducing impacts and a speed of impacts between proof masses and adjacent components in micro-electromechanical systems (MEMS) devices, said method comprising:
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configuring the proof masses with at least one deceleration indentation formed in the proof mass;
providing a plurality of deceleration beams which extend towards the proof mass from a body, the deceleration beams configured to engage at least one of the deceleration indentations and cause the proof mass to slow or stop before contacting any component of the MEMS device adjacent to the proof mass; and
providing an anchor for the body. - View Dependent Claims (33)
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34. A method for reducing impacts and a speed of impacts between proof masses and adjacent components in micro-electromechanical systems (MEMS) devices, the proof masses being suspended above a substrate by a plurality of suspensions, said method comprising:
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providing an anchor for the suspensions on the substrate;
forming a body which extends towards a proof mass;
anchoring the body;
configuring the body with a plurality of deceleration beams which extend towards the proof mass; and
configuring the proof mass with either at least one deceleration extension extending from the proof mass or at least one deceleration indentation formed in the proof mass, the deceleration extensions and deceleration indentations configured to engage at least one of the deceleration beams and cause the proof mass to slow or stop before contacting any component of the MEMS device adjacent the proof mass. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41)
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42. A deceleration stop for a micro-electromechanical systems (MEMS) device, the MEMS device comprising a substrate, and at least one proof mass suspended above said substrate, said deceleration stop comprising:
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a body attached to said substrate;
at least one deceleration beam extending from said proof mass; and
at least one deceleration indentation formed in said body;
said at least one deceleration extension configured to engage said at least one deceleration indentation and cause said proof mass to slow or stop before contacting components of the MEMS device adjacent to said proof mass.
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Specification