Sensor for detecting small concentrations of a target matter

• US 6,866,819 B1
• Filed: 11/13/2001
• Issued: 03/15/2005
• Est. Priority Date: 11/13/2001
• Status: Expired due to Term

• Current Assignee: Raytheon Company (Rtx Corporation)
• Original Assignee: Raytheon Company (Rtx Corporation)
• Inventors: Chandra, Dipankar, Syllaios, Athanasios J.
• Primary Examiner(s): Warden, Jill
• Assistant Examiner(s): SINES, BRIAN J
• Application Number:
  US10/006,891
• Time in Patent Office: 1,218 Days
• Field of Search: 422/50, 422/56, 422/57, 422/61, 422/68.1, 422/82.01, 422/82.02, 422/83, 422/88, 422/94, 422/96, 422/97, 422/98, 436/43, 436/149, 436/151, 73/10.1, 73/10.2, 73/232
• US Class Current: 422/50
• CPC Class Codes: G01N 27/12 of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in the fluid
• CPC Class Codes: G01N 33/0047 Organic compounds
• CPC Class Codes: Y10T 436/11 Automated chemical analysis

Abstract

A sensor for detecting a target matter includes a chemical sensitive layer that is operable to react when exposed to the target matter and a piezoresistive material coupled to the chemical sensitive layer. The chemical sensitive layer is configured such that the reaction of the target matter with the chemical sensitive layer creates an interfacial tension at the interface of the chemical sensitive layer and the piezoresistive material that changes the electrical resistance of the piezoresistive material. However, the chemical sensitive layer is configured such that the reaction of the target matter with the chemical sensitive layer does not affect the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material. The sensor also includes an electrical circuit coupled to the piezoresistive material that is operable to detect the change in the electrical resistance of the piezoresistive material due to the interfacial tension.

Claims

1. A sensor for detecting a target matter, the sensor comprising:

a chemical sensitive layer operable to react when exposed to the target matter;

a piezoresistive material coupled to the chemical sensitive layer;

the chemical sensitive layer having a thickness thin enough such that adsorption of the target matter into the chemical sensitive layer creates an interfacial tension at the interface of the chemical sensitive layer and the piezoresistive material that changes the electrical resistance of the piezoresistive material, but thick enough such that the reaction of the target matter with the chemical sensitive layer does not affect the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material; and

an electrical circuit coupled to the piezoresistive material operable to detect the change in the electrical resistance of the piezoresistive material due to the interfacial tension.

2. The sensor of claim 1, wherein the electrical circuit is further operable to detect the rate of change in the electrical resistance of the piezoresistive material to determine the concentration of the target matter.

3. The sensor of claim 1, wherein the electrical circuit is further operable to detect the rate of change in the electrical resistance of the piezoresistive material to determine the type of target matter.

4. The sensor of claim 1, wherein the chemical sensitive layer is configured such that the reaction of the target matter with the chemical sensitive layer does not change the dimensions of the chemical sensitive layer.

5. The sensor of claim 1, wherein the chemical sensitive layer is a mono-layer.

6. The sensor of claim 1, wherein the electrical circuit comprises a Wheatstone bridge.

7. The sensor of claim 6, wherein the Wheatstone bridge comprises at least two resistors, the piezoresistive material and a variable resistor.

8. The sensor of claim 7, wherein the electrical circuit further comprises a digital signal processor operable to dynamically vary the electrical resistance of the variable resistor to match the resistance of the piezoresistive material.

9. The sensor of claim 1, wherein the target matter comprises mercury and the chemical sensitive layer comprises gold.

10. The sensor of claim 1, wherein the target matter comprises a volatile organic compound and the chemical sensitive layer comprises photoresist.

11. A method of detecting a target matter comprising:

forming a chemical sensitive layer selected to react when exposed to the target matter;

coupling the chemical sensitive layer to a piezoresistive material, the chemical sensitive layer configured such that the reaction of the target matter with the chemical sensitive layer creates an interfacial tension at the interface of the chemical sensitive layer and the piezoresistive material that changes the electrical resistance of the piezoresistive material, but such that the reaction of the target matter with the chemical sensitive layer does not affect the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material;

exposing the chemical sensitive layer to the target matter; and

detecting a change in the electrical resistance of the piezoresistive material due to the interfacial tension.

12. The method of claim 11, further comprising correlating the measured change in resistance of the piezoresistive material with a corresponding concentration of the target matter.

13. The method of claim 11, further comprising correlating the measured change in resistance of the piezoresistive material with a corresponding type of target matter.

14. The method of claim 11, wherein the chemical sensitive layer is formed such that it has a thickness thin enough such that adsorption of the target matter into the chemical sensitive layer creates a interfacial tension at the interface of the chemical sensitive layer and the piezoresistive material.

15. The method of claim 11, wherein the chemical sensitive layer is formed such that it has a thickness thick enough such that the target matter does not affect the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material.

16. The method of claim 11, wherein the chemical sensitive layer is formed such that the reaction of the target matter with the chemical sensitive layer does not change the dimensions of the chemical sensitive layer.

17. The method of claim 11, wherein the chemical sensitive layer is a mono-layer.

18. The method of claim 11, wherein the change in electrical resistance is detected using a Wheatstone bridge.

19. The method of claim 18, wherein the Wheatstone bridge comprises at least two resistors, the piezoresistive material and a variable resistor.

20. The method of claim 19, further comprising dynamically varying the electrical resistance of the variable resistor to match the resistance of the piezoresistive material.

21. A sensor for detecting a target matter, the sensor comprising:

a chemical sensitive layer operable to react when exposed to the target matter;

a piezoresistive material coupled to the chemical sensitive layer;

the chemical sensitive layer having a thickness thin enough such that adsorption of the target matter into the chemical sensitive layer creates an interfacial tension at the interface of the chemical sensitive layer and the piezoresistive material that changes the electrical resistance of the piezoresistive material, but thick enough such that the reaction of the target matter with the chemical sensitive layer does not affect the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material;

an electrical circuit coupled to the piezoresistive material operable to detect the change in the electrical resistance of the piezoresistive material due to the interfacial tension; and

wherein the electrical circuit comprises a digital signal processor operable to dynamically vary the electrical resistance of the variable resistor to match the resistance of the piezoresistive material and a Wheatstone bridge that comprises at least two resistors, the piezoresistive material, and a variable resistor.

22. A method of detecting a target matter comprising:

exposing a chemical sensitive layer to the target matter;

creating, by reaction of the chemical sensitive layer with the target matter, an interfacial tension at an interface of the chemical sensitive layer and a piezoresistive material that changes the electrical resistance of the piezoelectrical material without affecting the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material; and

detecting a change in the electrical resistance of the piezoresistive material due to the created interfacial tension.