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Sensor for detecting small concentrations of a target matter

  • US 6,866,819 B1
  • Filed: 11/13/2001
  • Issued: 03/15/2005
  • Est. Priority Date: 11/13/2001
  • Status: Expired due to Term
First Claim
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1. A sensor for detecting a target matter, the sensor comprising:

  • a chemical sensitive layer operable to react when exposed to the target matter;

    a piezoresistive material coupled to the chemical sensitive layer;

    the chemical sensitive layer having a thickness thin enough such that adsorption of the target matter into the chemical sensitive layer creates an interfacial tension at the interface of the chemical sensitive layer and the piezoresistive material that changes the electrical resistance of the piezoresistive material, but thick enough such that the reaction of the target matter with the chemical sensitive layer does not affect the bulk properties of the chemical sensitive layer enough to change the electrical resistance of the piezoresistive material; and

    an electrical circuit coupled to the piezoresistive material operable to detect the change in the electrical resistance of the piezoresistive material due to the interfacial tension.

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