Multiple directional scans of test structures on semiconductor integrated circuits

• US 6,867,606 B2
• Filed: 03/13/2003
• Issued: 03/15/2005
• Est. Priority Date: 12/14/1999
• Status: Expired due to Term

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: KLA-Tencor Corporation
• Inventors: Walker, David J., Pinto, Gustavo A., Leslie, Brian C., Long, Robert Thomas, Satya, Akella V. S., Adler, David L.
• Primary Examiner(s): KARLSEN, ERNEST F
• Application Number:
  US10/390,502
• Publication Number:
  US 20030155927A1
• Time in Patent Office: 733 Days
• Field of Search: 324/750, 324/751, 324/501, 324/765, 250/310, 250/311, 382/149, 438/14, 438/17
• US Class Current: 324/754.21
• CPC Class Codes: G01N 21/66 electrically excited, e.g. electroluminescence
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 23/04 and forming images of the material
• CPC Class Codes: G01R 31/2884 using dedicated test connectors, test elements or test circuits on the IC under test G01R31/2855 takes precedence
• CPC Class Codes: G01R 31/307 of integrated circuits
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01L 22/34 Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line switching, multiplexing, gating devices G01R19/25; process control with lithography, e.g. dose control, G03F7/20; structures for alignment control by optical means G03F7/70633
• CPC Class Codes: Y10S 977/849 with scanning probe

Abstract

Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.

Claims

1. A method of inspecting contacts, comprising:

scanning a first plurality of contacts with an incident charged particle beam and detecting a first portion of charged particles emitted from the first contacts in response to the incident charged particle beam;

generating a first image from the first portion of charged particles;

scanning a second plurality of contacts with an incident charged particle beam and detecting a second portion of charged particles emitted from the second contacts in response to the incident charged particle beam;

generating a second image from the second portion of charged particles;

comparing the first image to the second image to obtain a difference image; and

using the difference image to determine whether the first contacts, the second contacts, or any of their underlying structures have an open defect or a short defect.

2. A method as recited in claim 1, wherein the first contacts are formed on a different die than the second contacts.

3. A method as recited in claim 1, further comprising:

for subsequently processed contacts, using the difference image to further determine whether the process for fabricating the subsequently processed contacts will be out of specification; and

adjusting the process when it is determined that the process for fabricating the subsequently processed samples is out of specification.

4. A method as recited in claim 1, wherein using the difference image comprises:

determining a number of defects based on the difference image obtained from the first sample;

determining an expected defect level based on the determined number of defects obtained from the first sample, and

determining that the process is out of specification when a defect level measured on the subsequently processed samples exceeds the expected defect level.

5. A method as recited in claim 1, wherein the first scanned portion is from a first die and the second scanned portion is from a second die.

6. A method as recited in claim 1, wherein the first scanned and the second scanned portion are both from a same die.