Interferometric modulation of radiation

• US 6,867,896 B2
• Filed: 09/28/2001
• Issued: 03/15/2005
• Est. Priority Date: 05/05/1994
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Miles, Mark W.
• Primary Examiner(s): Sugarman, Scott J.
• Assistant Examiner(s): HANIG, RICHARD E
• Application Number:
  US09/966,843
• Publication Number:
  US 20020015215A1
• Time in Patent Office: 1,264 Days
• Field of Search: 359/290, 359/291, 359/292, 359/295, 359/298
• US Class Current: 359/290
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 27/01 Head-up displays
• CPC Class Codes: G02B 27/017 Head mounted
• CPC Class Codes: G02B 6/12 of the integrated circuit kind electric integrated circuits H01L27/00
• CPC Class Codes: G02F 1/13725 based on guest-host interaction G02F1/13762, G02F1/13737, take precedence
• CPC Class Codes: G02F 1/169 based on orientable non-spherical particles having a common optical characteristic, e.g. suspended particles of reflective metal flakes
• CPC Class Codes: G02F 1/216 using liquid crystals, e.g. liquid crystal Fabry-Perot filters
• CPC Class Codes: G02F 2203/03 scattering
• CPC Class Codes: G06F 3/1431 using a single graphics controller
• CPC Class Codes: G06F 3/1446 display composed of modules, e.g. video walls
• CPC Class Codes: G06F 3/147 using display panels
• CPC Class Codes: G09G 2300/0408 Integration of the drivers onto the display substrate
• CPC Class Codes: G09G 2300/0452 : Details of colour pixel setup, e.g. pixel composed of a red, a blue and two green components
• CPC Class Codes: G09G 3/001 : using specific devices not provided for in groups G09G3/02 - G09G3/36, e.g. using an intermediate record carrier such as a film slide; Projection systems; Display of non-alphanumerical information, solely or in combination with alphanumerical information, e.g. digital display on projected diapositive as background slide projectors per se G03B23/00 = 42 HP
• CPC Class Codes: G09G 3/2014 : by modulation of the duration of a single pulse during which the logic level remains constant
• CPC Class Codes: G09G 3/2074 : using sub-pixels
• CPC Class Codes: G09G 3/2077 : by a combination of two or more gradation control methods
• CPC Class Codes: G09G 3/3466 : based on interferometric effect
• CPC Class Codes: G09G 5/02 : characterised by the way in which colour is displayed details of colour display specific for CRTs G09G1/28; specific for flat matrix panels other than liquid crystal displays G09G3/2003; specific for liquid crystal displays G09G3/3607
• CPC Class Codes: H01Q 9/26 : with folded element or elements, the folded parts being spaced apart a small fraction of operating wavelength resonant loop antennas H01Q7/00

Abstract

In one embodiment the invention provides an interferometric modulator comprising a cavity defined by two walls held by a support. The support comprises two materials such that the electrical or mechanical properties of the mechanical support differ at different locations in a cross-section of the mechanical support.

Claims

1. An array of interferometric modulators, each of the interferometric modulators comprising a cavity defined by two walls, at least two arms connecting the two walls to permit motion of the walls relative to each other, the walls and arms of different ones of the modulators being configured to achieve different spring constants associated with motion of the walls relative to each other.

2. The modulator of claim 1, in which each of the arms has two ends, one of the ends attached to the first wall and a second end that is attached at a point that is fixed relative to a second one of the walls, the point of attachment of the second end being offset, with reference to an axis that is perpendicular to the first wall, from the end that is attached to the second wall.

3. An interferometric modulator comprising three walls that are generally parallel to one another, the walls being supported for movement of at least one of the walls relative to the other two, and control circuitry for driving at least one of the walls to discrete positions representing three discrete states of operation of the modulator.

4. The modulator of claim 3, in which in one of the three discrete states, there is a gap between the first and a second of the two walls and a gap between the second and a third of the two walls, in a second of the three discrete states, there is a gap between the first and the second of the two walls and no gap between the second and the third of the two walls, and in the third of the three discrete states, there is no gap between the first and the second of the two walls and no gap between the second and the third of the two walls.

5. The modulator of claim 3, in which each membrane comprises a combination of dielectric, metallic, or semiconducting films.

6. An interference interferometric modulator comprising a cavity defined by two walls that are movable relative to one another to and from a contact position in which the two walls are essentially adjacent to one another, and spacers mounted to form part of one of the walls to reduce the surface area over which the two walls touch in the contact position.

7. The modulator of claim 6, in which the spacers comprise electrodes and further comprising conductors to feed current to the electrodes.

8. An interference interferometric modulator comprising at least two walls that are movable relative to each other to define a cavity between them, the relative positions of the walls defining two modes, one in which the modulator reflects incident light and appears white and another in which the modulator absorbs incident light and appears black.

9. The modulator of claim 8 in which one of the walls comprises a sandwich of a dielectric between metals, and the other of the walls comprises a dielectric.

10. An interferometric modulator comprising a cavity defined by two walls held by a support comprising two materials such that the electrical or mechanical properties of the mechanical support differ at different locations in a cross-section of the mechanical support.

11. The modulator of claim 10, in which the support comprises a laminate of two or more discrete materials.

12. The modulator of claim 10, in which the support comprises or a gradient of two or more materials.

13. The modulator of claim 10, in which the two materials exhibit respectively different and complementary electrical, mechanical, or optical properties.

14. An interference modulation device comprising:

a plurality of interference modulators fabricated in an array, each interference modulator comprising first and second walls that cooperate to interferometrically modulate light to produce first and second optical responses; and

a mounting arrangement mounting the second wall relative to the first wall so that the second wall is spaced from the first wall corresponding to an undriven condition in which the first optical response is produced, the mounting arrangement allowing displacement of the second wall towards the first wall corresponding to a driven condition in which the second optical response is produced, wherein the mounting arrangement allows for movement of the second wall when it is in the undriven condition thereby to relieve residual stress in the second wall.

15. The interference modulation device of claim 14, wherein the movement of the second wall is generally within a plane of the second wall.

16. The interference modulation device of claim 14, wherein the mounting arrangement comprises arms to support the second wall, the arms having a spring constant to allow the movement of the second wall to reduce residual stress therein.

17. An interferometric modulator comprising:

first and second walls which cooperate to interferometrically modulate light in a first operative position in which the walls are spaced apart by a gap and in a second operative position in which the position in which the walls are displaced to close the gap; and

an actuation mechanism comprising an electrode to electrostatically displace the second wall from the first operative position to the second operative position, the electrode having a reduced surface area so as to reduce charge build-up through contact with the second wall in the second operative position.

18. The interferometric modulator of claim 17, wherein the actuation mechanism further comprises a mechanism to reverse a polarity of a driving voltage applied to the electrode for each successive actuation of the electrode.

19. The interferometric modulator of claim 17, wherein the electrode comprises two spaced apart rails.