System for real time, non-invasive metrology of microfluidic chips

• US 6,868,347 B2
• Filed: 03/19/2003
• Issued: 03/15/2005
• Est. Priority Date: 03/19/2002
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Chen, Zhongping, Bachman, Mark, Li, Guann-Pyng
• Primary Examiner(s): NGHIEM, MICHAEL P
• Application Number:
  US10/393,109
• Publication Number:
  US 20030229459A1
• Time in Patent Office: 727 Days
• Field of Search: 702/45, 702/49, 702/50, 702/100, 600/425, 600/473, 600/476
• US Class Current: 702/50
• CPC Class Codes: G01B 2290/35 Mechanical variable delay line
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/0201 using temporal phase variation
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/02045 using the Doppler effect
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01B 9/02091 Tomographic interferometers, e.g. based on optical coherence
• CPC Class Codes: G16Z 99/00 Subject matter not provided for in other main groups of this subclass

Abstract

A system integration of multicomponent technologies includes an automated microfluidic probe station and the use of that station for the systematic study of nonideal, nonhomogeneous biological fluids such as blood in microfluidic chips. The probe station provides for real-time, non-invasive metrology of microfluidic chips employing optical coherence tomography and optical Doppler tomography to allow for collection of flow data at any location or depth within a microfluidics chip. Also included is a programmable fluidic loader and actuator platform as part of the probe station, and a semi-automated rapid prototyping tool used to fabricate the microfluidic chips measured on the probe station. The resulting data library produced by measurements on the probe station contains all the necessary information needed to develop mature, accurate microfluidic modeling and simulation CAD tools.

Claims

1. A system for non-invasive metrology of non-ideal fluids comprising:

a microfluidic chip having design parameters of interest;

fluid delivery means to deliver fluid to the microfluidic chip at selected design conditions;

means to employ either one of Optical Doppler Tomography or Optical Coherent Tomography to measure flow characteristics in the microfluidic chip; and

means to record subsequent flow data and using the flow data to predict flow properties of a non-ideal fluid of interest.

2. The system of claim 1, further comprising a computer to control the system for non-invasive metrology of non-ideal fluids and a microscope for inspection of the system.

3. The system of claim 1, further comprising one or more actuators that affect fluid flow at predetermined locations on the microfluidic chip.

4. The system of claim 1, further comprising a motorized stage platform to support the microfluidic.

5. The system of claim 1, wherein the fluid delivery means comprises:

a fluid reservoir;

a pump assembly to provide a pressurized fluid source; and

one or more fluidic probes each having a micropressure transducer for monitoring fluid pressure.

6. The system of claim 1, wherein the means to employ either one of Optical Doppler Tomography or Optical Coherent Tomography to measure flow characteristics in the microfluidic chip comprises a probe on a robotic arm.

7. A method of compiling fluid flow data useful in predicting and monitoring properties of non-ideal fluids comprising:

providing a microfluidic chip specially designed with non-variable parameters of interest;

loading the microfluidic chip with a non-ideal fluid of interest;

recording flow data of interest;

recording the chip non-variable parameters of interest;

recording and changing chip variable parameters of interest; and

recording subsequent flow data and using the flow data to predict flow properties of said non-ideal fluid of interest.

8. The method of claim 7, wherein the chip non-variable parameters of interest include:

fluid type, device type, geometry, material type, and surface condition.

9. The method of claim 7 wherein the flow data of interest includes velocity vector information.

10. The method of claim 7 wherein the chip variable parameters of interest includes:

state of the chip, pressure, actuator status, and temperature.