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System for real time, non-invasive metrology of microfluidic chips

  • US 6,868,347 B2
  • Filed: 03/19/2003
  • Issued: 03/15/2005
  • Est. Priority Date: 03/19/2002
  • Status: Active Grant
First Claim
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1. A system for non-invasive metrology of non-ideal fluids comprising:

  • a microfluidic chip having design parameters of interest;

    fluid delivery means to deliver fluid to the microfluidic chip at selected design conditions;

    means to employ either one of Optical Doppler Tomography or Optical Coherent Tomography to measure flow characteristics in the microfluidic chip; and

    means to record subsequent flow data and using the flow data to predict flow properties of a non-ideal fluid of interest.

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