Digital output MEMS pressure sensor and method
First Claim
1. A pressure-sensor system comprising:
- a micro-electo-mechanical system (MEMS) pressure-sensing element to provide a pressure-sensing output proportional to a sensed pressure;
an amplifier to amplify the pressure-sensing output and provide an output voltage linearly proportional to the pressure; and
a voltage-to-frequency converter to receive the output voltage and to provide a digital-frequency output linearly proportional to the pressure.
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Abstract
A method and pressure-sensor system provide a digital-frequency output linearly proportional to a sensed pressure. The system comprises a MEMS pressure-sensing element to provide a pressure-sensing output and voltage-to-frequency converter provide the digital-frequency output. The pressure-sensor system may also comprise an amplifier to provide an output voltage linearly proportional to the pressure. A temperature sensor and temperature-compensation circuitry provide a temperature-compensation signal to the amplifier to at least partially offset the effects of temperature on the system. Some embodiments of the present invention comprise a microcontroller system comprising a microcontroller and an RF transmitter. The microcontroller may receive the digital-frequency output and may generate a notification signal when the sensed pressure is inside or outside a predetermined pressure range. The RF transmitter may transmit an RF signal to indicate that the sensed pressure is inside or outside the predetermined pressure range.
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Citations
28 Claims
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1. A pressure-sensor system comprising:
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a micro-electo-mechanical system (MEMS) pressure-sensing element to provide a pressure-sensing output proportional to a sensed pressure;
an amplifier to amplify the pressure-sensing output and provide an output voltage linearly proportional to the pressure; and
a voltage-to-frequency converter to receive the output voltage and to provide a digital-frequency output linearly proportional to the pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A pressure-sensor system comprising:
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a micro-electo-mechanical system (MEMS) pressure-sensing element to provide a pressure-sensing output proportional to a sensed pressure;
a voltage-to-frequency converter to provide a digital-frequency output linearly proportional to the pressure based on the pressure-sensing output; and
a microcontroller system, wherein the microcontroller system is to receive the digital-frequency output, is to determine the sensed pressure and is to generate a response signal for other system elements when the sensed pressure is either inside or outside a predetermined pressure range. - View Dependent Claims (16, 17, 18)
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19. A pressure-sensor system comprising:
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a package;
a micro-electo-mechanical system (MEMS) pressure-sensing element to provide a pressure-sensing output proportional to a sensed pressure;
a voltage-to-frequency converter to provide a digital-frequency output linearly proportional to the pressure based on the pressure-sensing output; and
a semiconductor die mounted within the package, the semiconductor die including the pressure-sensing element; and
a lid on the package having an opening to allow a fluid into the package, wherein the sensed pressure is to deform the die, and wherein the pressure-sensing element is to provide either a capacitive or a resistive output in response to the deformation of the die. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification