Piezoelectrically driven fluids pump and piezoelectric fluid valve
First Claim
1. A fluid pump, comprising:
- a fluid reservoir;
a first membrane forming a first side of the reservoir;
a first piezoelectric element attached to the first membrane;
a fluid inlet into the reservoir;
a fluid outlet from the reservoir;
a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and
a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet;
wherein each of the first and second piezoelectric valves comprises two adjacent piezoelectric valve elements that are supported at first and second opposite ends and wherein opposing inner surfaces of the two adjacent piezoelectric valve elements are in continuous contact with each other from the first opposite end to the second opposite end when the piezoelectric valve is closed.
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Accused Products
Abstract
A piezoelectrically driven fluid pump includes a chamber having two opposite sidewalls formed by flexible membranes, and an inlet and an outlet each regulated by a valve. Separate piezo elements are fixed to each of the membranes, to flex the membranes and increase or reduce the chamber volume and thereby draw fluid into the chamber or expel fluid from the chamber. The valves are each formed by two adjacent piezo elements that are supported or flexibly joined together at two opposite ends. When actuated, the valve piezo elements flex outward between the two opposite ends, opening the valve to form an aperture between the two piezo elements. In another embodiment, a fluid pump includes a chamber having one flexible membrane sidewall. A valve-regulated inlet or outlet aperture through the membrane communicates with the pump chamber. A ring-shaped piezo centered around the aperture, on the membrane, flexes the membrane.
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Citations
28 Claims
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1. A fluid pump, comprising:
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a fluid reservoir;
a first membrane forming a first side of the reservoir;
a first piezoelectric element attached to the first membrane;
a fluid inlet into the reservoir;
a fluid outlet from the reservoir;
a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and
a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet;
wherein each of the first and second piezoelectric valves comprises two adjacent piezoelectric valve elements that are supported at first and second opposite ends and wherein opposing inner surfaces of the two adjacent piezoelectric valve elements are in continuous contact with each other from the first opposite end to the second opposite end when the piezoelectric valve is closed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 18, 27)
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15. A fluid pump, comprising:
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a fluid reservoir;
a first membrane forming a first side of the reservoir;
a first piezoelectric element attached to the first membrane;
a fluid inlet into the reservoir;
a fluid outlet from the reservoir;
a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and
a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet;
wherein each of the first and second piezoelectric valves comprises two adjacent piezoelectric valve elements that are supported at first and second opposite ends, and wherein the fluid outlet forms a passage through the first membrane. - View Dependent Claims (16)
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17. A fluid pump, comprising:
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a fluid reservoir;
a first membrane forming a first side of the reservoir;
a first piezoelectric element attached to the first membrane;
a fluid inlet into the reservoir;
a fluid outlet from the reservoir;
a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and
a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet;
wherein the first and second piezoelectric valves each comprise two adjacent piezoelectric valve elements that are supported at first and second opposite ends, and wherein the first piezoelectric element has a ring shape.
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19. A piezoelectric valve arranged to regulate fluid flow through the valve, comprising:
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two adjacent piezoelectric elements that are supported at first and second opposite ends, wherein opposing inner surfaces of the two adjacent piezoelectric valve elements are in continuous contact from the first opposite end to the second opposite end when the piezoelectric valve is closed. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 28)
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Specification