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Piezoelectrically driven fluids pump and piezoelectric fluid valve

  • US 6,869,275 B2
  • Filed: 02/14/2002
  • Issued: 03/22/2005
  • Est. Priority Date: 02/14/2002
  • Status: Expired due to Term
First Claim
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1. A fluid pump, comprising:

  • a fluid reservoir;

    a first membrane forming a first side of the reservoir;

    a first piezoelectric element attached to the first membrane;

    a fluid inlet into the reservoir;

    a fluid outlet from the reservoir;

    a first piezoelectric valve arranged to regulate fluid flow through the fluid inlet; and

    a second piezoelectric valve arranged to regulate fluid flow through the fluid outlet;

    wherein each of the first and second piezoelectric valves comprises two adjacent piezoelectric valve elements that are supported at first and second opposite ends and wherein opposing inner surfaces of the two adjacent piezoelectric valve elements are in continuous contact with each other from the first opposite end to the second opposite end when the piezoelectric valve is closed.

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