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Linear motor and stage apparatus, exposure apparatus, and device manufacturing method using the same

  • US 6,870,284 B2
  • Filed: 02/22/2002
  • Issued: 03/22/2005
  • Est. Priority Date: 02/23/2001
  • Status: Active Grant
First Claim
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1. A linear motor comprising:

  • a first magnet group having a plurality of first magnets arrayed such that polarization directions thereof are periodically opposite, and a plurality of second magnets arrayed such that polarization directions thereof are periodically opposite and intersect those of the first magnets;

    a second magnet group having a plurality of third magnets arrayed such that polarization directions thereof are periodically opposite, and a plurality of fourth magnets arrayed such that polarization directions thereof are periodically opposite and intersect those of said third magnets;

    a support member which supports the first magnet group on one side and the second magnet group on the other side;

    first and second electromagnetic coils disposed on both sides of the support member, wherein the first electromagnetic coil is disposed to oppose the first magnet group to generate a Lorentz force in cooperation with the first magnet group, and the second electromagnetic coil is disposed to oppose the second magnet group to generate a Lorentz force in cooperation with the second magnet group; and

    first and second yokes disposed on both sides of the support member, wherein the first yoke is integrated with the first electromagnetic coil and the second yoke is integrated with the second electromagnetic coil.

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